A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications
This paper is designed to review the MEMS switch by considering key aspects on the basis
of mechanical structure, actuation methods, and types of contact and circuit configurations …
of mechanical structure, actuation methods, and types of contact and circuit configurations …
Revolutionizing wireless communication: A review perspective on design and optimization of RF MEMS switches
Abstract Micro Electro Mechanical System (MEMS) technology revolutionized electronics by
enabling miniaturization and integration of components like sensors, actuators, & switches …
enabling miniaturization and integration of components like sensors, actuators, & switches …
A study on improved methods in Micro-electromechanical systems technology
JA Khatokar, N Vinay, AS Bale, MA Nayana… - Materials Today …, 2021 - Elsevier
This current review describes the various micro fabrication techniques, the reliability view of
various processes and the various problems that are caused during these processes. This …
various processes and the various problems that are caused during these processes. This …
Dynamic modelling and analysis of V-and Z-shaped electrothermal microactuators
This paper presents a dynamic model and design analysis for V-and Z-shaped
electrothermal microactuators operating in vacuum and in air conditions. The model is …
electrothermal microactuators operating in vacuum and in air conditions. The model is …
Closed-form modelling and design analysis of V-and Z-shaped electrothermal microactuators
Z Zhang, W Zhang, Q Wu, Y Yu, X Liu… - … of Micromechanics and …, 2016 - iopscience.iop.org
This paper presents the modelling and design analysis of V-and Z-shaped electrothermal
microactuators. First, a comprehensive but concise closed-form multiphysical analytical …
microactuators. First, a comprehensive but concise closed-form multiphysical analytical …
A hybrid RF MEMS switch actuated by the combination of bidirectional thermal actuations and electrostatic holding
Radio frequency microelectro-mechanical system (RF MEMS) switches have received
attention due to their higher performances at high frequencies compared with semiconductor …
attention due to their higher performances at high frequencies compared with semiconductor …
High power latching RF MEMS switches
Latching RF MEMS Switches of Single-Pole-Single-Throw (SPST), Single-Pole-Double-
Throw (SPDT) and Single-Pole-Triple-Throw (SP3T) types are proposed. The switches are …
Throw (SPDT) and Single-Pole-Triple-Throw (SP3T) types are proposed. The switches are …
Artificial neural network approach to model sidewall metallization of silicon-based bistable Lateral RF MEMS switch for redundancy applications
Abstract Radio Frequency Micro Electro Mechanical System (RF MEMS) switches are
rapidly evolving due to the demand for low cost, high performance, and compact …
rapidly evolving due to the demand for low cost, high performance, and compact …
Integrated magnetic MEMS relays: Status of the technology
The development and application of magnetic technologies employing microfabricated
magnetic structures for the production of switching components has generated enormous …
magnetic structures for the production of switching components has generated enormous …
Electro-thermally actuated non-volatile mechanical memory with CMOS-level operation voltage and low contact resistance
A non-volatile mechanical memory device with CMOS-level operation voltage and low
contact resistance is proposed utilizing electro-thermal actuation method for the first time …
contact resistance is proposed utilizing electro-thermal actuation method for the first time …