A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications

Kurmendra, R Kumar - Microsystem Technologies, 2021 - Springer
This paper is designed to review the MEMS switch by considering key aspects on the basis
of mechanical structure, actuation methods, and types of contact and circuit configurations …

Revolutionizing wireless communication: A review perspective on design and optimization of RF MEMS switches

JJ Percy, S Kanthamani - Microelectronics Journal, 2023 - Elsevier
Abstract Micro Electro Mechanical System (MEMS) technology revolutionized electronics by
enabling miniaturization and integration of components like sensors, actuators, & switches …

A study on improved methods in Micro-electromechanical systems technology

JA Khatokar, N Vinay, AS Bale, MA Nayana… - Materials Today …, 2021 - Elsevier
This current review describes the various micro fabrication techniques, the reliability view of
various processes and the various problems that are caused during these processes. This …

Dynamic modelling and analysis of V-and Z-shaped electrothermal microactuators

Z Zhang, Y Yu, X Liu, X Zhang - Microsystem Technologies, 2017 - Springer
This paper presents a dynamic model and design analysis for V-and Z-shaped
electrothermal microactuators operating in vacuum and in air conditions. The model is …

Closed-form modelling and design analysis of V-and Z-shaped electrothermal microactuators

Z Zhang, W Zhang, Q Wu, Y Yu, X Liu… - … of Micromechanics and …, 2016 - iopscience.iop.org
This paper presents the modelling and design analysis of V-and Z-shaped electrothermal
microactuators. First, a comprehensive but concise closed-form multiphysical analytical …

A hybrid RF MEMS switch actuated by the combination of bidirectional thermal actuations and electrostatic holding

U Chae, HY Yu, C Lee, IJ Cho - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
Radio frequency microelectro-mechanical system (RF MEMS) switches have received
attention due to their higher performances at high frequencies compared with semiconductor …

High power latching RF MEMS switches

M Bakri-Kassem, RR Mansour - IEEE transactions on …, 2014 - ieeexplore.ieee.org
Latching RF MEMS Switches of Single-Pole-Single-Throw (SPST), Single-Pole-Double-
Throw (SPDT) and Single-Pole-Triple-Throw (SP3T) types are proposed. The switches are …

Artificial neural network approach to model sidewall metallization of silicon-based bistable Lateral RF MEMS switch for redundancy applications

JJ Percy, S Kanthamani, S Sethuraman, SMM Roomi… - Silicon, 2022 - Springer
Abstract Radio Frequency Micro Electro Mechanical System (RF MEMS) switches are
rapidly evolving due to the demand for low cost, high performance, and compact …

Integrated magnetic MEMS relays: Status of the technology

G Schiavone, MPY Desmulliez, AJ Walton - Micromachines, 2014 - mdpi.com
The development and application of magnetic technologies employing microfabricated
magnetic structures for the production of switching components has generated enormous …

Electro-thermally actuated non-volatile mechanical memory with CMOS-level operation voltage and low contact resistance

PK Choi, YB Lee, S Kim, TS Kim… - Journal of …, 2021 - ieeexplore.ieee.org
A non-volatile mechanical memory device with CMOS-level operation voltage and low
contact resistance is proposed utilizing electro-thermal actuation method for the first time …