Silicon MEMS inertial sensors evolution over a quarter century
Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …
A review on MEMS based micro displacement amplification mechanisms
S Iqbal, A Malik - Sensors and Actuators A: Physical, 2019 - Elsevier
This paper provides a comprehensive review on the design and development of micro
displacement amplification mechanisms. Micro displacement amplification mechanisms are …
displacement amplification mechanisms. Micro displacement amplification mechanisms are …
Conductive cellulose composites with low percolation threshold for 3D printed electronics
We are reporting a 3D printable composite paste having strong thixotropic rheology. The
composite has been designed and investigated with highly conductive silver nanowires. The …
composite has been designed and investigated with highly conductive silver nanowires. The …
Current sensing front-ends: A review and design guidance
Sensors link the physical and electronic worlds, finding uses in environmental, automotive,
industrial, communication, and medical applications, among many more. Here, current …
industrial, communication, and medical applications, among many more. Here, current …
A Closed-Loop Interface for a High-Q Micromechanical Capacitive Accelerometer With 200 ng/Hz Input Noise Density
H Xu, X Liu, L Yin - IEEE Journal of Solid-State Circuits, 2015 - ieeexplore.ieee.org
In this paper, a fully-differential high-order switched-capacitor (SC) sigma-delta (ΣΔ)
interface in a standard 0.5 μm CMOS technology for a micromechanical capacitive …
interface in a standard 0.5 μm CMOS technology for a micromechanical capacitive …
Electromechanical Sigma–Delta Modulators ( ) Force Feedback Interfaces for Capacitive MEMS Inertial Sensors: A Review
Analog-to-digital converters based on sigma-delta modulators (ΣAM) are a popular choice
for high resolution conversion from the analog to the digital domain. With relatively small …
for high resolution conversion from the analog to the digital domain. With relatively small …
A 2.92- W Capacitance-to-Digital Converter With Differential Bondwire Accelerometer, On-Chip Air Pressure, and Humidity Sensor in 0.18- m CMOS
S Park, GH Lee, SH Cho - IEEE Journal of Solid-State Circuits, 2019 - ieeexplore.ieee.org
This paper presents a sensor front end for air pressure sensor, relative humidity (RH)
sensor, and accelerometer in a standard CMOS process, equipped with a wide input range …
sensor, and accelerometer in a standard CMOS process, equipped with a wide input range …
Sub-micro-gravity in-plane accelerometers with reduced capacitive gaps and extra seismic mass
This paper presents a robust fabrication technique for manufacturing ultrasensitive
micromechanical capacitive accelerometers in thick silicon-on-insulator substrates. The …
micromechanical capacitive accelerometers in thick silicon-on-insulator substrates. The …
Micromachined high-resolution accelerometers
In this paper, we review the high-resolution, micromachined accelerometers by enunciating
the development of their mechanical components, the electronic circuitry and the …
the development of their mechanical components, the electronic circuitry and the …
A sub-µg bias-instability MEMS oscillating accelerometer with an ultra-low-noise read-out circuit in CMOS
This paper describes a SOI MEMS oscillating accelerometer with a fully differential CMOS
continuous-time read-out circuit. A new ultra-low-noise continuous-time bandpass …
continuous-time read-out circuit. A new ultra-low-noise continuous-time bandpass …