A review of nanometer resolution position sensors: Operation and performance

AJ Fleming - Sensors and Actuators A: Physical, 2013 - Elsevier
Position sensors with nanometer resolution are a key component of many precision imaging
and fabrication machines. Since the sensor characteristics can define the linearity …

Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues

YK Yong, SOR Moheimani, BJ Kenton… - Review of scientific …, 2012 - pubs.aip.org
Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …

Production of phosphorene nanoribbons

MC Watts, L Picco, FS Russell-Pavier, PL Cullen… - Nature, 2019 - nature.com
Phosphorene is a mono-elemental, two-dimensional (2D) substance with outstanding,
highly directional properties and a bandgap that depends on the number of layers of the …

[書籍][B] Atomic force microscopy

P Eaton, P West - 2010 - books.google.com
Atomic force microscopy is an amazing technique that allies a versatile methodology (that
allows measurement of samples in liquid, vacuum or air) to imaging with unprecedented …

[書籍][B] Handbook of surface and nanometrology

DJ Whitehouse - 2002 - taylorfrancis.com
The Handbook of Surface and Nanometrology explains and challenges current concepts in
nanotechnology. It covers in great detail surface metrology and nanometrology and more …

High-speed atomic force microscopy coming of age

T Ando - Nanotechnology, 2012 - iopscience.iop.org
High-speed atomic force microscopy (HS-AFM) is now materialized. It allows direct
visualization of dynamic structural changes and dynamic processes of functioning biological …

Design and control of a three-axis serial-kinematic high-bandwidth nanopositioner

BJ Kenton, KK Leang - IEEE/ASME Transactions on …, 2011 - ieeexplore.ieee.org
The development of a high-performance three-axis serial-kinematic nanopositioning stage is
presented. The stage is designed for high-bandwidth applications that include video-rate …

A review of feedforward control approaches in nanopositioning for high-speed SPM

GM Clayton, S Tien, KK Leang, Q Zou, S Devasia - 2009 - asmedigitalcollection.asme.org
Control can enable high-bandwidth nanopositioning needed to increase the operating
speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact …

[書籍][B] Atomic force microscopy for biologists

VJ Morris, AR Kirby, PA Gunning - 2009 - books.google.com
Atomic force microscopy (AFM) is part of a range of emerging microscopic methods for
biologists which offer the magnification range of both the light and electron microscope, but …

Development of a high-bandwidth XY nanopositioning stage for high-rate micro-/nanomanufacturing

S Polit, J Dong - IEEE/ASME Transactions on mechatronics, 2010 - ieeexplore.ieee.org
This paper presents the design analysis fabrication and testing of a high-bandwidth piezo-
driven parallel kinematic nanopositioning XY stage. The monolithic stage design has two …