Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)

OO Versolato, J Sheil, S Witte, W Ubachs… - Journal of …, 2022 - iopscience.iop.org
Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …

[HTML][HTML] Strongly anisotropic ion emission in the expansion of Nd: YAG-laser-produced plasma

L Poirier, DJ Hemminga, A Lassise, L Assink… - Physics of …, 2022 - pubs.aip.org
We present results from a combined experimental and numerical simulation study of the
anisotropy of the expansion of a laser-produced plasma into vacuum. Plasma is generated …

Material-specific high-order harmonic generation in laser-produced plasmas for varying plasma dynamics

J Mathijssen, Z Mazzotta, AM Heinzerling… - Applied Physics B, 2023 - Springer
We present a new experimental setup for high-order harmonic generation in laser-produced
plasmas, allowing the generation of coherent VUV and EUV light, as well as characterisation …

Evidence of production of keV Sn+ ions in the H2 buffer gas surrounding an Sn-plasma EUV source

S Rai, KI Bijlsma, L Poirier, E De Wit… - Plasma Sources …, 2023 - iopscience.iop.org
Charge-state-resolved kinetic energy spectra of Sn ions ejected from a laser-produced
plasma (LPP) of Sn have been measured at different densities of the H 2 buffer gas …

Charge exchange in collisions of 1–100-keV ions with and

S Rai, KI Bijlsma, I Rabadán, L Méndez, PAJ Wolff… - Physical Review A, 2022 - APS
Absolute cross sections for single electron capture by Sn 3+ colliding with H 2 and D 2 have
been measured and calculated in the energy range of 1–100 keV. The cross sections are …

Energy-and charge-state-resolved spectrometry of tin laser-produced plasma using a retarding field energy analyzer

L Poirier, A Lassise, Y Mostafa, L Behnke… - Applied Physics B, 2022 - Springer
We present a method to obtain the individual charge-state-dependent kinetic-energy
distributions of tin ions emanating from a laser-produced plasma from their joint overlap** …

[HTML][HTML] Dependence of ion charge-energy emission from Nd: YAG-laser-produced plasma on laser intensity in the 0.4–40× 10 10 W/cm2 range

L Poirier, A Lassise, R Hoekstra, J Sheil… - Physics of …, 2023 - pubs.aip.org
We experimentally characterize the ionic emission, including the individual charge states Sn
z+(⁠ z= 1,…, 8⁠), from laser-produced tin plasma as a function of the intensity of the …

Electron Capture from Molecular Hydrogen by Metastable Sn2+* Ions

K Bijlsma, L Oltra, E de Wit, L Assink, I Rabadán… - Atoms, 2024 - mdpi.com
Over a wide and partly overlap** energy range, the single-electron capture cross-sections
for collisions of metastable Sn 2+(5 s 5 p P o 3)(Sn 2+∗) ions with H 2 molecules were …

Electron capture in collisions of tin ions with molecular hydrogen

K Bijlsma - 2024 - research.rug.nl
Electron capture is a fundamental process in which a positively charged projectile particle
moves past a neutral target particle and where it takes one or more electrons from the target …