Accelerometers are one of the widely explored microsensors with many transduction
mechanisms. One of the primary concerns with piezoresistive microaccelerometers is their …

This paper presents realization of a MEMS piezoresistive single axis accelerometer using
dual doped TMAH solution. The silicon micromachined structure consists of a heavy …

The paper focuses on the design, simulation, fabrication and experiment of a low cross-axis
sensitivity piezoresistive accelerometer fabricated by masked-maskless wet etching in …

This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer
with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS …

Piezoresistive accelerometers have served as the frontrunners in micromachined
accelerometer technology and have undergone modifications with the primary focus on …

This paper presents fabrication and testing of a high performance quad beam silicon
piezoresistive Z-axis accelerometer with a very-low cross-axis sensitivity. Cross-axis …

A piezoresistive microaccelerometer with multi-beam structure is developed for vibration
monitoring in intelligent manufacturing equipment. The proposed accelerometer provides a …

Performance enhancement of a silicon MEMS piezoresistive single axis accelerometer with
electroplated gold on a proof mass is presented in this paper. The fabricated accelerometer …

A novel polymer MEMS (micro electro mechanical systems) accelerometer with photo-
patternable polymer nanocomposite as a piezoresistor is presented in this work. Polymer …

This paper investigates the static and dynamic performances of a new enhanced design of 3-
axis MEMS polymer piezoresistive accelerometer. Its key geometric parameters are …