Polydimethylsiloxane as polymeric protective coating for fabrication of ultra-thin chips
The bendable silicon-based ultra-thin chips (UTCs), with thickness below 50 μm are needed
to provide high-performance flexible electronics for several emerging applications ranging …
to provide high-performance flexible electronics for several emerging applications ranging …
The fabrication of back etching 3C-SiC-on-Si diaphragm employing KOH+ IPA in MEMS capacitive pressure sensor
The 680 µm thick wafer is back-etched, leaving the thin film 3C-SiC as the flexible
diaphragm to detect pressure. The etching processes are performed with three different KOH …
diaphragm to detect pressure. The etching processes are performed with three different KOH …
High-density electrical and optical probes for neural readout and light focusing in deep brain tissue
To advance neuroscience in vivo experiments, it is necessary to probe a high density of
neurons in neural networks with single-cell resolution and be able to simultaneously use …
neurons in neural networks with single-cell resolution and be able to simultaneously use …
A self-aligned structure based on V-groove for accurate silicon bridge placement
As a lower cost alternative to silicon interposers with through silicon vias (TSVs), silicon
bridges have been developed for high-performance computing (HPC) and/or …
bridges have been developed for high-performance computing (HPC) and/or …
Zeolite based microconcentrators for volatile organic compounds sensing at trace-level: fabrication and performance
F Almazán, I Pellejero, A Morales… - Journal of …, 2016 - iopscience.iop.org
A novel 6-step microfabrication process is proposed in this work to prepare microfluidic
devices with integrated zeolite layers. In particular, microfabricated preconcentrators …
devices with integrated zeolite layers. In particular, microfabricated preconcentrators …
Neural optoelectrodes merging semiconductor scalability with polymeric-like bendability for low damage acute in vivo neuron readout and stimulation
Neural optoelectrodes can read and manipulate large numbers of neurons in vivo. However,
state-of-the-art devices rely on either standard microfabrication materials (ie, silicon and …
state-of-the-art devices rely on either standard microfabrication materials (ie, silicon and …
Mechanical analysis of MEMS diaphragm for bladder pressure monitoring
Implantable bladder pressure sensor need to be very sensitive due to its very low pressure
range detection. Hence, proper choice of a diaphragm structure is important as it would give …
range detection. Hence, proper choice of a diaphragm structure is important as it would give …
Scalable nanophotonic neural probes for multicolor and on-demand light delivery in brain tissue
Neural probes are in vivo brain-invasive devices that record and manipulate neural circuits
using electricity, light, or drugs. The capability to shine distinct wavelengths and control their …
using electricity, light, or drugs. The capability to shine distinct wavelengths and control their …
Ultra-thin and flexible CMOS technology: ISFET-based microsystem for biomedical applications
A Vilouras - 2021 - theses.gla.ac.uk
A new paradigm of silicon technology is the ultra-thin chip (UTC) technology and the
emerging applications. Very thin integrated circuits (ICs) with through-silicon vias (TSVs) will …
emerging applications. Very thin integrated circuits (ICs) with through-silicon vias (TSVs) will …
Characterization of ProTEX® PSB Thin Film as a Photosensitive Layer for MEMS Capacitive Pressure Sensor Diaphragm Based on SiC-on-Si Wafer
The ProTEX® PSB thin film as a photosensitive layer has been released in the market as an
alternative replacement for silicon nitride or silicon oxide wet etch masks. In this work, this …
alternative replacement for silicon nitride or silicon oxide wet etch masks. In this work, this …