MEMS (Micro Electro-Mechanical Systems) sensors enable a vast range of applications:
among others, the use of MEMS accelerometers for seismology related applications has …

Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

This paper introduces a differential vibrating beam MEMS accelerometer demonstrating
excellent long-term stability for applications in gravimetry and seismology. The MEMS …

This paper reports an acceleration sensing method based on two weakly coupled
resonators (WCRs) using the phenomenon of mode localization. When acceleration acts on …

Nanoelectromechanical system accelerometers have the potential to be utilized in next-
generation consumer electronics, inertial navigation, and seismology due to their low cost …

In-situ monitoring is an important aspect of geotechnical projects to ensure safety and
optimise design measures. However, existing conventional monitoring instruments are …

According to their inherent characteristics, MEMS resonant accelerometers are suitable for
low-frequency, low-g acceleration measurement. In this paper, we report a MEMS …

This letter presents a high-performance resonant MEMS accelerometer comprising of a
single force-sensitive vibrating beam element sandwiched between two inertial masses. The …

Acceleration measurement is of great significance due to its extensive applications in
military/industrial fields. In recent years, scientists have been pursuing methods to improve …

A sensitive micromachined resonant accelerometer that exhibits extremely low noise floor
and excellent bias stability is presented for future application of moving-base gravimetry. An …