Precursors for direct-write nanofabrication with electrons
Focused electron beam-induced deposition (FEBID) is a maskless, direct-write
nanolithography approach for the growth of nanostructures. In recent years, significant …
nanolithography approach for the growth of nanostructures. In recent years, significant …
Focused electron beam induced deposition meets materials science
M Huth, F Porrati, OV Dobrovolskiy - Microelectronic Engineering, 2018 - Elsevier
Focused electron beam induced deposition (FEBID) is a direct-write method for the
fabrication of nanostructures whose lateral resolution rivals that of advanced electron beam …
fabrication of nanostructures whose lateral resolution rivals that of advanced electron beam …
Roadmap for focused ion beam technologies
The focused ion beam (FIB) is a powerful tool for fabrication, modification, and
characterization of materials down to the nanoscale. Starting with the gallium FIB, which was …
characterization of materials down to the nanoscale. Starting with the gallium FIB, which was …
Writing 3D nanomagnets using focused electron beams
Focused electron beam induced deposition (FEBID) is a direct-write nanofabrication
technique able to pattern three-dimensional magnetic nanostructures at resolutions …
technique able to pattern three-dimensional magnetic nanostructures at resolutions …
3D nanoprinting via focused electron beams
Additive manufacturing of three-dimensional objects on the nanoscale is a very relevant
topic but still a highly challenging task. Among the pool of nanofabrication techniques …
topic but still a highly challenging task. Among the pool of nanofabrication techniques …
[HTML][HTML] Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical …
Nanostructured materials made from group 10 (Ni, Pd, Pt) and group 11 (Cu, Ag, Au)
elements have outstanding technological relevance in microelectronics, nano-optics …
elements have outstanding technological relevance in microelectronics, nano-optics …
Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition
Focused electron beam induced deposition (FEBID) is one of the few techniques that
enables direct-write synthesis of free-standing 3D nanostructures. While the fabrication of …
enables direct-write synthesis of free-standing 3D nanostructures. While the fabrication of …
Focused electron beam-based 3D nanoprinting for scanning probe microscopy: a review
Scanning probe microscopy (SPM) has become an essential surface characterization
technique in research and development. By concept, SPM performance crucially depends …
technique in research and development. By concept, SPM performance crucially depends …
Layer-by-layer growth of complex-shaped three-dimensional nanostructures with focused electron beams
The fabrication of three-dimensional (3D) nanostructures is of great interest to many areas of
nanotechnology currently challenged by fundamental limitations of conventional lithography …
nanotechnology currently challenged by fundamental limitations of conventional lithography …
Directing matter: toward atomic-scale 3D nanofabrication
Enabling memristive, neuromorphic, and quantum-based computing as well as efficient
mainstream energy storage and conversion technologies requires the next generation of …
mainstream energy storage and conversion technologies requires the next generation of …