[HTML][HTML] Role of nanomaterials in the fabrication of bioNEMS/MEMS for biomedical applications and towards pioneering food waste utilisation

NA Dahlan, A Thiha, F Ibrahim, L Milić, S Muniandy… - Nanomaterials, 2022 - mdpi.com
bioNEMS/MEMS has emerged as an innovative technology for the miniaturisation of
biomedical devices with high precision and rapid processing since its first R&D …

Wet anisotropic etching characteristics of Si {111} in NaOH-based solution for silicon bulk micromachining

S Purohit, V Swarnalatha, AK Pandey, P Pal - Micro and Nano Systems …, 2022 - Springer
Silicon bulk micromachining is extensively employed method in microelectromechanical
systems (MEMS) for the formation of freestanding (eg, cantilevers) and fixed (eg, cavities) …

Wet Anisotropic Etching Characteristics of Si {111} in KOH-Based Solution

X Yu, Y Ye, P Zhu, L Wu, R Shen, C Zhu - ACS omega, 2025 - ACS Publications
Wet chemical etching of silicon has been a topic of significant interest due to its importance
in microelectromechanical systems (MEMS), nanotechnology, and semiconductor device …

Wet bulk micromachining characteristics of Si {110} in NaOH-based solution

S Purohit, V Swarnalatha, AK Pandey… - Journal of …, 2022 - iopscience.iop.org
Silicon wet bulk micromachining is an extensively used technique in
microelectromechanical systems (MEMS) to fabricate variety of microstructures. It utilizes low …

Unveiling polycrystalline silicon channel dissolution mechanism in wet etching process of 3D NAND fabrication

Z Zhou, Y Wu, S Han, T Hang, H Ling, J Guo… - Surfaces and …, 2024 - Elsevier
Abstract 3D NAND is one of the most promising storage devices due to its high storage
density and low energy consumption. Selective wet etching of Si 3 N 4 by hot-concentrated …

UTILIZATION OF SURFACE TREATED INDUCTION FURNACE SLAG (IFS) AS REPLACEMENT OF COARSE AGGREGATE IN CONCRETE

UA Shafiq - 2024 - repositories.nust.edu.pk
This study aims to mitigate the environmental and economic impacts of steel and concrete
production by exploring the utilization of Induction Furnace Slag (IFS) Aggregates in …