The design, fabrication and characterization of a large displacement thermal actuator with a
cascaded V-beam amplification for MEMS safety-and-arming (SA) devices are presented …

In this paper, several experimental mechanical investigation techniques are presented to
evaluate the reliability of micro-electro-mechanical systems (MEMS). Microsystems in recent …

The design, fabrication and characterisation of a high‐speed electrothermal linear
micromotor for microelectromechanical systems safety‐and‐arming devices are presented …

The focus of this study is to analyse the temperature, stress, and mechanical displacement
distribution of a U-shaped one hot-arm Microelectromechanical System (MEMS) based …

This paper investigates the effect of stress and strains concentration, due to the notch
presence, on the elasto-plastic behavior of gold microstructures subjected to tensile loading …

Simulation, finite element analysis and experimental investigations of the dynamical
response of a microresonator under electrostatic actuation are presented in this paper. The …

This paper presents the fabrication and characterization of a mechanical microswitch
structures for the out-of-the plane displacements. The mobile electrode is connected to the …

The contact mechanism of contact pair in microscale is widely studied both in micro tribology
and micro technology. This paper introduced a micro gear mechanism (MGM) for studying …

Ultra high density data storage imposes an ever increasing demand on the capacity and
speed of data storage systems becoming an essential issue in this digital age. Secondary …

In this paper, several experimental mechanical investigation techniques are presented to
evaluate the reliability of micro-electro-mechanical systems (MEMS). Microsystems in recent …