PEALD deposited aluminum hafnium mixed oxide dielectrics for amorphous-IGZO TFTs

HB Chen, WY Wu, YT Wang, JH Yan, MJ Zhao… - Ceramics …, 2024 - Elsevier
Abstract (Al–Hf) mixed oxide thin films (HfAlO) are attracted by many researchers because of
their outstanding optical and electrical properties compared to hafnium oxide (HfO 2). This …

Highly sensitive and selective detection of dopamine using atomic layer deposited HfO2 ultra-thin films

DA Abraham, AD Li, A Sanmugam, MA Wadaan… - Electrochimica …, 2024 - Elsevier
The development of non-enzymatic and binder-free biosensors plays a vital role, and it
possesses main benefits for effective biomolecule recognition with high sensitivity and …

Solution-processed metal oxide dielectric films: Progress and outlook

WJ Lee, T Kwak, JG Choi, S Park, MH Yoon - APL Materials, 2021 - pubs.aip.org
There has been growing interest in the use of the sol-gel approach to form high-quality
dielectric materials. Their tailored properties allow for develo** functional electronic …

[HTML][HTML] Lanthanum doped hafnium oxide thin films deposited on a lateral high aspect ratio structure using atomic layer deposition: A comparative study of surface …

J Emara, AM Kia, S Bönhardt, C Mart, K Kühnel… - Applied Surface …, 2025 - Elsevier
Hafnium oxide (HfO 2) thin films doped with lanthanum (La) can achieve ferroelectricity,
making the material applicable in transistor and memory technologies. To downscale future …

Substrate temperature effects on PEALD HfAlO dielectric films for IGZO-TFT applications

HB Chen, CH Hsu, WY Wu, WZ Zhang, J Zhang… - Applied Surface …, 2024 - Elsevier
Aluminum incorporated hafnium oxide (HfAlO) has garnered significant attention due to its
high dielectric constant. The present study employs supercycle plasma-enhanced atomic …

High-performance indium–tin oxide (ito) electrode enabled by a counteranion-free metal–polymer complex

G Park, D Kim, G Kim, U Jeong - ACS Nanoscience Au, 2022 - ACS Publications
Although multicomponent inorganic thin films (metal-oxides,-carbides,-nitrides, and-
chalcogenides) have been synthesized by polymer-assisted deposition (PAD), synthesis of …

Starch/methyl cellulose-based microsupercapacitors for on-chip applications

R Nigam, KK Kar - Journal of Materials Science: Materials in Electronics, 2023 - Springer
Micron thin films and microsupercapacitors based on polyvinyl alcohol, starch, methyl
cellulose, and nickel acetate have been fabricated using the one-step formation of laser …

Tuning of dielectric properties in Ti-Doped granular HfO2 nanoparticles for high-k applications

S Pokhriyal, S Biswas - Ceramics International, 2022 - Elsevier
An array of titanium (Ti) doped HfO 2 [(Hf 1-x Ti x O 2)(x= 0.0–1.0)] nanoparticles (NPs)
synthesis and the study of their structural, spectroscopic, and dielectric properties is …

Tuning the electrical performance of solution-processed In2O3TFTs by low-temperature with HfO2-PVP hybrid dielectric

MGS Rao, J Meza-Arroyo, KCS Reddy… - Materials Today …, 2021 - Elsevier
Here in, we investigated the solution-processed and hysteresis-free indium oxide (In 2 O 3)
thin-film transistors (TFTs) fabricated with hafnium oxide-poly (vinyl) phenol (HfO 2-PVP) …

Effect of do** concentration on intrinsic ferroelectric properties of HfLaO-based ferroelectric memory

Y Liu, T Wang, K Xu, Z Li, J Yu, Y Song… - IEEE Electron …, 2023 - ieeexplore.ieee.org
With the rapid development of HfLaO ferroelectric films, research on the influence of do**
concentration on ferroelectric properties is in urgent need. In this work, we investigated the …