CFD simulation of an O2/N2 separation process using an industrial PIHF membrane module for...

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Enhancing CMP Performance of Micro-Structured Pad Patterns: CFD Simulations and Experimental Evaluations

AS Mofakham, H Kim, H Cho, K Lee… - ECS Journal of Solid …, 2024 - iopscience.iop.org
This study explored the impact of micropattern designs on slurry dynamics in chemical
mechanical planarization (CMP), focusing on pressure distribution, slurry flow and …
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[PDF][PDF] Enhancing CMP Performance of Micro-Structured Pad Patterns: CFD Simulations and Experimental Evaluations

Y Park, H Jung, D Kim - 2024 - researchgate.net
This study explored the impact of micropattern designs on slurry dynamics in chemical
mechanical planarization (CMP), focusing on pressure distribution, slurry flow and …
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