Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review

AJM Mackus, JR Schneider, C MacIsaac… - Chemistry of …, 2018‏ - ACS Publications
In the past decade, atomic layer deposition (ALD) has become an important thin film
deposition technique for applications in nanoelectronics, catalysis, and other areas due to its …

Process–property relationship in high-k ALD SrTiO 3 and BaTiO 3: a review

JH Shim, HJ Choi, Y Kim, J Torgersen, J An… - Journal of Materials …, 2017‏ - pubs.rsc.org
Perovskites exhibit a wide range of remarkable material properties that have the potential to
advance various scientific fields. These properties originate in their unique structure and …

Functional perovskites by atomic layer deposition–an overview

HH Sønsteby, H Fjellvåg… - Advanced Materials …, 2017‏ - Wiley Online Library
The last 20 years have seen a massive increase in reports on complex oxides with
functional properties synthesized by atomic layer deposition (ALD). Many of these …

Suitability of binary oxides for molecular-beam epitaxy source materials: A comprehensive thermodynamic analysis

KM Adkison, SL Shang, BJ Bocklund, D Klimm… - APL Materials, 2020‏ - pubs.aip.org
We have conducted a comprehensive thermodynamic analysis of the volatility of 128 binary
oxides to evaluate their suitability as source materials for oxide molecular-beam epitaxy …

[HTML][HTML] Atomic layer deposition of functional multicomponent oxides

M Coll, M Napari - Apl Materials, 2019‏ - pubs.aip.org
Advances in the fabrication of multicomponent oxide thin films are crucial to prepare specific
compositions with precise structures and controlled interfaces. This will enable the …

Recent developments in molecular precursors for atomic layer deposition

AL Johnson, JD Parish - 2018‏ - books.rsc.org
One field of organometallic and materials chemistry that has seen great advancements over
the last 20 years is that of atomic layer deposition (ALD), and in particular the development …

All-room-temperature processed 17.25%-crystalline silicon solar cell

SH Kim, JY Jung, RB Wehrspohn… - ACS Applied Energy …, 2020‏ - ACS Publications
In creating the next generation of crystalline silicon (c-Si) solar cells, the goals are to
improve energy conversion efficiency and reduce costs. Here, we demonstrate all-room …

On the Importance of Nanoparticle Necks and Carbon Impurities for Charge Trap** in TiO2

MJ Elser, E Neige, T Berger, M Chiesa… - The Journal of …, 2023‏ - ACS Publications
Particle attachment and neck formation inside TiO2 nanoparticle networks determine
materials performance in sensing, photo-electrochemistry, and catalysis. Nanoparticle necks …

High-throughput methodology for the realization of high-entropy sub-nm equivalent-oxide-thickness high-dielectric-constant Ba (Ti, Zr, Ta, Hf, Mo) O3 film-based metal …

T Nagata, KS Chang - Materials Today Physics, 2023‏ - Elsevier
This paper reports the use of a high-throughput sputtering technique for the fabrication of
high-entropy high-dielectric-constant (high-k) Ba (Ti, Zr, Ta, Hf, Mo) O 3 film libraries on Si …

[HTML][HTML] Atomic layer deposition of epitaxial ferroelectric barium titanate on Si (001) for electronic and photonic applications

EL Lin, AB Posadas, L Zheng… - Journal of Applied …, 2019‏ - pubs.aip.org
Epitaxial barium titanate (BTO) thin films are grown on strontium titanate-buffered Si (001)
using atomic layer deposition (ALD) at 225 C. X-ray diffraction confirms compressive strain …