Physics of laser-driven tin plasma sources of EUV radiation for nanolithography

OO Versolato - Plasma Sources Science and Technology, 2019 - iopscience.iop.org
Laser-produced transient tin plasmas are the sources of extreme ultraviolet (EUV) light at
13.5 nm wavelength for next-generation nanolithography, enabling the continued …

[BOOK][B] Differentiability and fractality in dynamics of physical systems

I Merches, M Agop - 2015 - books.google.com
Using Cartan's differential 1-forms theory, and assuming that the motion variables depend
on Euclidean invariants, certain dynamics of the material point and systems of material …

High-energy ions from Nd: YAG laser ablation of tin microdroplets: comparison between experiment and a single-fluid hydrodynamic model

DJ Hemminga, L Poirier, MM Basko… - Plasma Sources …, 2021 - iopscience.iop.org
We present the results of a joint experimental and theoretical study of plasma expansion
arising from Nd: YAG laser ablation (laser wavelength λ= 1.064 μm) of tin microdroplets in …

Plasma physics and radiation hydrodynamics in develo** an extreme ultraviolet light source for lithography

K Nishihara, A Sunahara, A Sasaki, M Nunami… - Physics of …, 2008 - pubs.aip.org
Extreme ultraviolet (EUV) radiation from laser-produced plasma (LPP) has been thoroughly
studied for application in mass production of next-generation semiconductor devices. One …

[HTML][HTML] Strongly anisotropic ion emission in the expansion of Nd: YAG-laser-produced plasma

L Poirier, DJ Hemminga, A Lassise, L Assink… - Physics of …, 2022 - pubs.aip.org
We present results from a combined experimental and numerical simulation study of the
anisotropy of the expansion of a laser-produced plasma into vacuum. Plasma is generated …

Self-similar expansion of finite-size non-quasi-neutral plasmas into vacuum: Relation to the problem of ion acceleration

M Murakami, MM Basko - Physics of plasmas, 2006 - pubs.aip.org
A new self-similar solution is presented which describes nonrelativistic expansion of a finite
plasma mass into vacuum with a full account of charge separation effects. The solution …

Experimental and theoretical investigations of a laser-produced aluminum plasma

S Gurlui, M Agop, P Nica, M Ziskind, C Focsa - Physical Review E—Statistical …, 2008 - APS
The formation and dynamics of a laser-produced aluminum plasma have been
experimentally and theoretically investigated. The visible-emitting regions of the plasma …

Similarity properties and scaling laws of radiation hydrodynamic flows in laboratory astrophysics

E Falize, C Michaut, S Bouquet - The Astrophysical Journal, 2011 - iopscience.iop.org
The spectacular recent development of modern high-energy density laboratory facilities
which concentrate more and more energy in millimetric volumes allows the astrophysical …

[HTML][HTML] On the missing single collision peak in low energy heavy ion scattering

RA Wilhelm, MJ Deuzeman, S Rai, W Husinsky… - Nuclear Instruments and …, 2023 - Elsevier
We present experimental and simulation data on the oblique angle scattering of heavy Sn
ions at 14 keV energy from a Mo surface. The simulations are performed with the binary …

Evidence of production of keV Sn+ ions in the H2 buffer gas surrounding an Sn-plasma EUV source

S Rai, KI Bijlsma, L Poirier, E De Wit… - Plasma Sources …, 2023 - iopscience.iop.org
Charge-state-resolved kinetic energy spectra of Sn ions ejected from a laser-produced
plasma (LPP) of Sn have been measured at different densities of the H 2 buffer gas …