Microhotplate platforms for chemical sensor research
This paper describes the development and use of microdevices and microarrays in chemical
sensor research. The surface-micromachined “microhotplate” structure common within the …
sensor research. The surface-micromachined “microhotplate” structure common within the …
[LIVRE][B] Silicon wet bulk micromachining for MEMS
P Pal, K Sato - 2017 - taylorfrancis.com
Microelectromechanical systems (MEMS)-based sensors and actuators have become
remarkably popular in the past few decades. Rapid advances have taken place in terms of …
remarkably popular in the past few decades. Rapid advances have taken place in terms of …
Micro-differential scanning calorimeter for combustible gas sensing
RE Cavicchi, GE Poirier, NH Tea, M Afridi… - Sensors and Actuators B …, 2004 - Elsevier
A micron-scale differential scanning calorimeter (μDSC) has been produced on a silicon
chip allowing for microscopic differential scanning calorimetry (DSC) measurements on …
chip allowing for microscopic differential scanning calorimetry (DSC) measurements on …
Development of silicon grisms and immersion gratings for high-resolution infrared spectroscopy
J Ge, DL McDavitt, JL Bernecker… - … for Atmospheric and …, 2002 - spiedigitallibrary.org
We report new results on silicon grism and immersion grating development using
photolithography and anisotropic chemical etching techniques, which include process …
photolithography and anisotropic chemical etching techniques, which include process …
Top–down SiGe nanostructures on Ge membranes realized by e-beam lithography and wet etching
SiGe nanostructures on Ge membranes have been fabricated by electron beam lithography
and anisotropic wet-chemical etching, starting from SiGe/Ge heterostructures epitaxially …
and anisotropic wet-chemical etching, starting from SiGe/Ge heterostructures epitaxially …
Design and fabrication of ultrathin silicon-nitride membranes for use in UV-visible airgap-based MEMS optical filters
MEMS-based airgap optical filters are composed of quarter-wave thick high-index dielectric
membranes that are separated by airgaps. The main challenge in the fabrication of these …
membranes that are separated by airgaps. The main challenge in the fabrication of these …
Electrical isolation of dislocations in Ge layers on Si (001) substrates through CMOS-compatible suspended structures
Suspended crystalline Ge semiconductor structures are created on a Si (001) substrate by a
combination of epitaxial growth and simple patterning from the front surface using …
combination of epitaxial growth and simple patterning from the front surface using …
Micro and nanofabrication of SiGe/Ge bridges and membranes by wet-anisotropic etching
Germanium bridges and membranes have been fabricated by lithography and wet-
anisotropic chemical etching from SiGe/Ge heterostructures epitaxially deposited on Si …
anisotropic chemical etching from SiGe/Ge heterostructures epitaxially deposited on Si …
Postprocessing, readout and packaging methods for integrated gas flow sensors
Two different architectures of integrated thermal flow meters based on a differential
temperature configuration are investigated. A standard structure made up of a heater placed …
temperature configuration are investigated. A standard structure made up of a heater placed …
High-voltage extension (V/sub BR//spl ges/800 V) for smart-power SOI-technologies
T Rotter, M Stoisiek - IEDM Technical Digest. IEEE International …, 2004 - ieeexplore.ieee.org
In this paper the experimental verification for the incorporation of high-voltage devices (/sub
BR//spl ges/800 V) within industrial smart-power SOI technologies of only low blocking …
BR//spl ges/800 V) within industrial smart-power SOI technologies of only low blocking …