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High power pulsed magnetron sputtering: A review on scientific and engineering state of the art
High power pulsed magnetron sputtering (HPPMS) is an emerging technology that has
gained substantial interest among academics and industrials alike. HPPMS, also known as …
gained substantial interest among academics and industrials alike. HPPMS, also known as …
A review comparing cathodic arcs and high power impulse magnetron sputtering (HiPIMS)
A Anders - Surface and Coatings Technology, 2014 - Elsevier
High power impulse magnetron sputtering (HiPIMS) has been at the center of attention over
the last years as it is an emerging physical vapor deposition (PVD) technology that …
the last years as it is an emerging physical vapor deposition (PVD) technology that …
Physics and technology of magnetron sputtering discharges
JT Gudmundsson - Plasma Sources Science and Technology, 2020 - iopscience.iop.org
Magnetron sputtering deposition has become the most widely used technique for deposition
of both metallic and compound thin films and is utilized in numerous industrial applications …
of both metallic and compound thin films and is utilized in numerous industrial applications …
High power impulse magnetron sputtering discharge
The high power impulse magnetron sputtering (HiPIMS) discharge is a recent addition to
plasma based sputtering technology. In HiPIMS, high power is applied to the magnetron …
plasma based sputtering technology. In HiPIMS, high power is applied to the magnetron …
An introduction to thin film processing using high-power impulse magnetron sputtering
High-power impulse magnetron sputtering (HiPIMS) is a promising sputtering-based ionized
physical vapor deposition technique and is already making its way to industrial applications …
physical vapor deposition technique and is already making its way to industrial applications …
Deposition rates of high power impulse magnetron sputtering: Physics and economics
A Anders - Journal of Vacuum Science & Technology A, 2010 - pubs.aip.org
Deposition by high power impulse magnetron sputtering (HIPIMS) is considered by some as
the new paradigm of advanced sputtering technology, yet this is met with skepticism by …
the new paradigm of advanced sputtering technology, yet this is met with skepticism by …
Effect of bias voltage on TiAlSiN nanocomposite coatings deposited by HiPIMS
TiAlSiN nanocomposite coatings were deposited onto cemented carbide (WC-10 wt.%, Co)
substrates by high power impulse magnetron sputtering (HiPIMS). The effect of substrate …
substrates by high power impulse magnetron sputtering (HiPIMS). The effect of substrate …
Influence of substrate bias voltage on microstructure and mechanical characteristics of TiAlSiN coating deposited by High Power Impulse Magnetron Sputtering …
Substrate bias voltage has a presumably predominant and significant influence on the
microstructural morphology and mechanical properties of HiPIMS deposited coatings. In the …
microstructural morphology and mechanical properties of HiPIMS deposited coatings. In the …
Plasma diagnostics for understanding the plasma–surface interaction in HiPIMS discharges: a review
N Britun, T Minea, S Konstantinidis… - Journal of Physics D …, 2014 - iopscience.iop.org
The physical and chemical aspects of plasma–surface interaction in high-power impulse
magnetron sputtering (HiPIMS) discharges are overviewed. The data obtained by various …
magnetron sputtering (HiPIMS) discharges are overviewed. The data obtained by various …
Recent developments and applications of TiN-based films synthesized by magnetron sputtering
Magnetron sputtering is a plasma-based Physical Vapor Deposition technique for synthesis
of surface coatings. In the present survey, we have summarized and discussed in detail both …
of surface coatings. In the present survey, we have summarized and discussed in detail both …