High power pulsed magnetron sputtering: A review on scientific and engineering state of the art

K Sarakinos, J Alami, S Konstantinidis - Surface and coatings technology, 2010 - Elsevier
High power pulsed magnetron sputtering (HPPMS) is an emerging technology that has
gained substantial interest among academics and industrials alike. HPPMS, also known as …

A review comparing cathodic arcs and high power impulse magnetron sputtering (HiPIMS)

A Anders - Surface and Coatings Technology, 2014 - Elsevier
High power impulse magnetron sputtering (HiPIMS) has been at the center of attention over
the last years as it is an emerging physical vapor deposition (PVD) technology that …

Physics and technology of magnetron sputtering discharges

JT Gudmundsson - Plasma Sources Science and Technology, 2020 - iopscience.iop.org
Magnetron sputtering deposition has become the most widely used technique for deposition
of both metallic and compound thin films and is utilized in numerous industrial applications …

High power impulse magnetron sputtering discharge

JT Gudmundsson, N Brenning, D Lundin… - Journal of vacuum …, 2012 - pubs.aip.org
The high power impulse magnetron sputtering (HiPIMS) discharge is a recent addition to
plasma based sputtering technology. In HiPIMS, high power is applied to the magnetron …

An introduction to thin film processing using high-power impulse magnetron sputtering

D Lundin, K Sarakinos - Journal of Materials Research, 2012 - cambridge.org
High-power impulse magnetron sputtering (HiPIMS) is a promising sputtering-based ionized
physical vapor deposition technique and is already making its way to industrial applications …

Deposition rates of high power impulse magnetron sputtering: Physics and economics

A Anders - Journal of Vacuum Science & Technology A, 2010 - pubs.aip.org
Deposition by high power impulse magnetron sputtering (HIPIMS) is considered by some as
the new paradigm of advanced sputtering technology, yet this is met with skepticism by …

Effect of bias voltage on TiAlSiN nanocomposite coatings deposited by HiPIMS

Q Ma, L Li, Y Xu, J Gu, L Wang, Y Xu - Applied surface science, 2017 - Elsevier
TiAlSiN nanocomposite coatings were deposited onto cemented carbide (WC-10 wt.%, Co)
substrates by high power impulse magnetron sputtering (HiPIMS). The effect of substrate …

Influence of substrate bias voltage on microstructure and mechanical characteristics of TiAlSiN coating deposited by High Power Impulse Magnetron Sputtering …

CR Das, M Rangwala, A Ghosh - Surface and Coatings Technology, 2023 - Elsevier
Substrate bias voltage has a presumably predominant and significant influence on the
microstructural morphology and mechanical properties of HiPIMS deposited coatings. In the …

Plasma diagnostics for understanding the plasma–surface interaction in HiPIMS discharges: a review

N Britun, T Minea, S Konstantinidis… - Journal of Physics D …, 2014 - iopscience.iop.org
The physical and chemical aspects of plasma–surface interaction in high-power impulse
magnetron sputtering (HiPIMS) discharges are overviewed. The data obtained by various …

Recent developments and applications of TiN-based films synthesized by magnetron sputtering

S Atta, U NarendraKumar, K Kumar, DP Yadav… - Journal of Materials …, 2023 - Springer
Magnetron sputtering is a plasma-based Physical Vapor Deposition technique for synthesis
of surface coatings. In the present survey, we have summarized and discussed in detail both …