Interface dipole engineering in metal gate/high-k stacks

AP Huang, XH Zheng, ZS ** layers in TiN/LaN/AlN/HfSiOx/Si stack
XH Zheng, AP Huang, ZS ** layers of
TiN/LaN/AlN/HfSiOx/Si stacks are investigated. Depth profiling and chemical state analysis …

[PDF][PDF] A two-dimensional threshold voltage analytical model for metal-gate/high-k/SiO2/Si stacked MOSFET

M Fei, L Hong-**a, F Ji-Bin… - Chin. Physics,(IEEE …, 2012 - cpb.iphy.ac.cn
In this paper the influences of the metal-gate and high-k/SiO2/Si stacked structure on the
metal–oxide–semiconductor field-effect transistor (MOSFET) are investigated. The flat-band …

Comprehensive comparison of structural, electrical, and reliability characteristics of HfO2 gate dielectric with H2O or O3 oxidant

YL Cheng, YL Chang, CY Hsieh, JR Lin - Journal of Vacuum Science & …, 2013 - pubs.aip.org
The growth, composition, electrical characteristics, and reliability performance of high-k HfO
2 dielectric films that were deposited by an atomic layer deposition technique are studied …