Large capacitance-voltage hysteresis loops in SiO2 films containing Ge nanocrystals produced by ion implantation and annealing
CJ Park, KH Cho, WC Yang, HY Cho, SH Choi… - Applied physics …, 2006 - pubs.aip.org
Metal-oxide-semiconductor structures containing Ge nanocrystals (NCs) of 3–4 nm diameter
and 2× 10 12 cm− 2 density are shown to exhibit capacitance-voltage hysteresis of 20.9 V …
and 2× 10 12 cm− 2 density are shown to exhibit capacitance-voltage hysteresis of 20.9 V …
Elemental redistribution and Ge loss during ion-beam synthesis of Ge nanocrystals in films
V Beyer, J Von Borany - Physical Review B—Condensed Matter and Materials …, 2008 - APS
The elemental redistribution and Ge loss in low-energy Ge+ implanted SiO 2 films during
wet-chemical cleaning and annealing procedures are investigated. Two effects of major …
wet-chemical cleaning and annealing procedures are investigated. Two effects of major …
Phase separation in SiGe nanocrystals embedded in SiO2 matrix during high temperature annealing
SiGe nanocrystals have been formed in SiO 2 matrix by cosputtering Si, Ge, and SiO 2
independently on Si substrate. Effects of the annealing time and temperature on structural …
independently on Si substrate. Effects of the annealing time and temperature on structural …
Amorphous Ge quantum dots embedded in SiO2 formed by low energy ion implantation
JP Zhao, DX Huang, ZY Chen, WK Chu… - Journal of Applied …, 2008 - pubs.aip.org
Under ultrahigh vacuum conditions, extremely small Ge nanodots embedded in Si O 2, ie,
Ge–Si O 2 quantum dot composites, have been formed by ion implantation of Ge+ 74 …
Ge–Si O 2 quantum dot composites, have been formed by ion implantation of Ge+ 74 …
Evidence of a thermally stimulated charge transfer mechanism and interface defect formation in metal-oxide-semiconductor structures with germanium nanocrystals
R Beyer, J von Borany - Journal of Applied Physics, 2009 - pubs.aip.org
The trap** of charge carriers and the mechanism of the charge transfer were examined in
metal-oxide-semiconductor structures with germanium nanocrystals embedded in a 20 nm …
metal-oxide-semiconductor structures with germanium nanocrystals embedded in a 20 nm …
Evolution of SiO2/Ge/HfO2 (Ge) multilayer structure during high temperature annealing
Use of germanium as a storage medium combined with a high-k dielectric tunneling oxide is
of interest for non-volatile memory applications. The device structure consists of a thin HfO2 …
of interest for non-volatile memory applications. The device structure consists of a thin HfO2 …
Annealing temperature dependence of capacitance-voltage characteristics in Ge-nanocrystal-based nonvolatile memory structures
The annealing temperature (TA) dependence of capacitance-voltage (CV) characteristics
has been studied in metal-oxide-semiconductor structures containing Ge nanocrystals (NCs) …
has been studied in metal-oxide-semiconductor structures containing Ge nanocrystals (NCs) …
Interface and border trap relaxation in Si–SiO2 structures with Ge nanocrystals examined by transient capacitance spectroscopy
R Beyer, J Von Borany, H Burghardt - Microelectronic engineering, 2009 - Elsevier
The formation of interface and border states in metal–oxide–semiconductors structures
associated with the generation of embedded germanium nanocrystals in 20nm SiO2-layers …
associated with the generation of embedded germanium nanocrystals in 20nm SiO2-layers …
Optical and electrical evaluations of SiGe layers on insulator fabricated using Ge condensation by dry oxidation
D Wang, H Nakashima - Solid-state electronics, 2009 - Elsevier
Photoluminescence (PL) and dual-metal-oxide-semiconductor (dual-MOS) deep level
transient spectroscopy (DLTS) evaluations were performed for SiGe layers on insulator …
transient spectroscopy (DLTS) evaluations were performed for SiGe layers on insulator …
Behavior of germanium ion-implanted into SiO2 near the bonding interface of a silicon-on-insulator structure
IE Tyschenko, M Voelskow, AG Cherkov, VP Popov - Semiconductors, 2007 - Springer
The properties of germanium implanted into the SiO 2 layers in the vicinity of the bonding
interface of silicon-on-insulator structures are studied. It is shown that, under conditions of …
interface of silicon-on-insulator structures are studied. It is shown that, under conditions of …