Silicon MEMS inertial sensors evolution over a quarter century
Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …
Review and perspectives of micro/nano technologies as key-enablers of 6G
To date, the rollout of 5G (5 th generation of mobile communications) has been ongoing for
more than two years, with most of it still to come. Meanwhile, Key-Performance Indicators …
more than two years, with most of it still to come. Meanwhile, Key-Performance Indicators …
Strain sensing by electrical capacitive variation: From stretchable materials to electronic interfaces
Sensing the motion of objects and humans is essential for various applications, including
human‐machine interfaces. Over the past few years, motion sensing has been extensively …
human‐machine interfaces. Over the past few years, motion sensing has been extensively …
MEMS and MOEMS gyroscopes: A review
W Huang, X Yan, S Zhang, Z Li, JNA Hassan, D Chen… - Photonic Sensors, 2023 - Springer
Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-
mechanical system (MOEMS) are the new-generation and recently well-developed …
mechanical system (MOEMS) are the new-generation and recently well-developed …
A novel progressive wave gyroscope based on acousto-optic effects
We propose and numerically investigate a brand-new, high-sensitivity progressive wave
gyroscope based on acousto-optic effects for the measurement of rotational angular velocity …
gyroscope based on acousto-optic effects for the measurement of rotational angular velocity …
MEMS-based micro sensors for measuring the tiny forces acting on insects
H Takahashi - Sensors, 2022 - mdpi.com
Small insects perform agile locomotion, such as running, jum**, and flying. Recently,
many robots, inspired by such insect performance, have been developed and are expected …
many robots, inspired by such insect performance, have been developed and are expected …
Innovative Fusion Strategy for MEMS Redundant-IMU Exploiting Custom 3D Components
In recent years, the overall performances of inertial Micro-Electro Mechanical Sensors
(MEMSs) exhibited substantial improvements to values very close or similar to so-called …
(MEMSs) exhibited substantial improvements to values very close or similar to so-called …
High precision hemispherical resonator gyroscopes with oven control systems
W Zhao, Y Rong, C Li, Y Wang, X Cai… - IEEE Sensors …, 2021 - ieeexplore.ieee.org
This work presents a high reliable hemispherical resonator gyroscope (HRG) with a solution
of an oven control system. The dynamics and thermal characteristics are firstly analyzed with …
of an oven control system. The dynamics and thermal characteristics are firstly analyzed with …
[HTML][HTML] Dynamics of large oscillations in electrostatic MEMS
We present a comprehensive experimental study of the dynamics of electrostatic MEMS
resonators under large excitations. We identified three frequency ranges where large …
resonators under large excitations. We identified three frequency ranges where large …
[HTML][HTML] Noise Analysis and Suppression Methods for the Front-End Readout Circuit of a Microelectromechanical Systems Gyroscope
C He, Y Xu, X Wang, H Wu, L Cheng, G Yan, Q Huang - Sensors, 2024 - mdpi.com
Circuit noise is a critical factor that affects the performances of an MEMS gyroscope.
Therefore, it is essential to analyze and suppress the noises in the key analog circuits, which …
Therefore, it is essential to analyze and suppress the noises in the key analog circuits, which …