Silicon MEMS inertial sensors evolution over a quarter century

G Langfelder, M Bestetti, M Gadola - Journal of Micromechanics …, 2021 - iopscience.iop.org
Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

Review and perspectives of micro/nano technologies as key-enablers of 6G

J Iannacci, HV Poor - IEEE Access, 2022 - ieeexplore.ieee.org
To date, the rollout of 5G (5 th generation of mobile communications) has been ongoing for
more than two years, with most of it still to come. Meanwhile, Key-Performance Indicators …

Strain sensing by electrical capacitive variation: From stretchable materials to electronic interfaces

H Nesser, G Lubineau - Advanced Electronic Materials, 2021 - Wiley Online Library
Sensing the motion of objects and humans is essential for various applications, including
human‐machine interfaces. Over the past few years, motion sensing has been extensively …

MEMS and MOEMS gyroscopes: A review

W Huang, X Yan, S Zhang, Z Li, JNA Hassan, D Chen… - Photonic Sensors, 2023 - Springer
Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-
mechanical system (MOEMS) are the new-generation and recently well-developed …

A novel progressive wave gyroscope based on acousto-optic effects

L Tian, Q Shen, H Chang - Microsystems & Nanoengineering, 2022 - nature.com
We propose and numerically investigate a brand-new, high-sensitivity progressive wave
gyroscope based on acousto-optic effects for the measurement of rotational angular velocity …

MEMS-based micro sensors for measuring the tiny forces acting on insects

H Takahashi - Sensors, 2022 - mdpi.com
Small insects perform agile locomotion, such as running, jum**, and flying. Recently,
many robots, inspired by such insect performance, have been developed and are expected …

Innovative Fusion Strategy for MEMS Redundant-IMU Exploiting Custom 3D Components

G de Alteriis, AT Silvestri, C Conte, V Bottino, E Caputo… - Sensors, 2023 - mdpi.com
In recent years, the overall performances of inertial Micro-Electro Mechanical Sensors
(MEMSs) exhibited substantial improvements to values very close or similar to so-called …

High precision hemispherical resonator gyroscopes with oven control systems

W Zhao, Y Rong, C Li, Y Wang, X Cai… - IEEE Sensors …, 2021 - ieeexplore.ieee.org
This work presents a high reliable hemispherical resonator gyroscope (HRG) with a solution
of an oven control system. The dynamics and thermal characteristics are firstly analyzed with …

[HTML][HTML] Dynamics of large oscillations in electrostatic MEMS

MS Alghamdi, ME Khater, M Arabi, EM Abdel-Rahman - Physics Reports, 2024 - Elsevier
We present a comprehensive experimental study of the dynamics of electrostatic MEMS
resonators under large excitations. We identified three frequency ranges where large …

[HTML][HTML] Noise Analysis and Suppression Methods for the Front-End Readout Circuit of a Microelectromechanical Systems Gyroscope

C He, Y Xu, X Wang, H Wu, L Cheng, G Yan, Q Huang - Sensors, 2024 - mdpi.com
Circuit noise is a critical factor that affects the performances of an MEMS gyroscope.
Therefore, it is essential to analyze and suppress the noises in the key analog circuits, which …