In this paper we report on the design, fabrication and characterization of terahertz (THz) bi-
material sensors with metamaterial absorbers. MEMS fabrication-friendly SiO_x and Al are …

Metamaterial absorbers with nearly 100% absorption in the terahertz (THz) spectral band
have been designed and fabricated using a periodic array of aluminum (Al) squares and an …

This Letter describes the fabrication of a microelectromechanical systems (MEMS) bimaterial
terahertz (THz) sensor operating at 3.8 THz. The incident THz radiation is absorbed by a …

A strategy for a microbolometer operating over a wide range of temperatures up to 100° C
with low nonlinearity and without hysteresis is described, based on a thermally stable VO 2 …

We describe the design, fabrication, and characterization of arrays of uncooled infrared and
terahertz micromechanical detectors that utilize SiO 2 as a main structural material. Materials …

Our work aims to identify nano-scale metal films with enhanced absorption in the terahertz
(THz) spectral range (1 to 10 THz) that can be incorporated in thermal imagers that operate …

Optomechanical uncooled infrared (IR) detectors based on the thermal deformation of bi-
material micro-cantilever have proved of significant potential in the IR imaging fields …

The optomechanical uncooled infrared (IR) detector, characterized by a straightforward
manufacturing process and sensitivity comparable to photonic detectors, employs bi …

Optical sensitivity is a major issue to improve the sensor responsivity and the spatial
resolution of uncooled optomechanical focal plane arrays (FPA). The optical sensitivity is …

The thermal imaging performance of bi-material microcantilever uncooled infrared focal
plane array depends on its thermal deformation sensitivity (the ratio of the microcantilever …