Proton exchange-enhanced surface activated bonding for facile fabrication of monolithic lithium niobate microfluidic chips
Y Du, Z Pang, Y Zou, B Zhu, L Liu, X Zhang… - Chemical Engineering …, 2024 - Elsevier
In the quest to enhance the functionality and efficiency of lab-on-a-chip systems, integrating
diverse physical phenomena such as acoustics, optics, and electronics into a single platform …
diverse physical phenomena such as acoustics, optics, and electronics into a single platform …
Asymmetric Proton-Exchange-Enhanced Lithium Niobate and Silicon Low-Temperature Direct Bonding with an Ultrathin Heterogeneous Interface
Y Du, Y Zou, B Zhu, H Jiang, Y Chai… - … Applied Materials & …, 2024 - ACS Publications
The integration of lithium niobate (LiNbO3 or LN) and silicon (Si) has emerged as a
promising heterogeneous platform for microelectromechanical systems (MEMSs) and …
promising heterogeneous platform for microelectromechanical systems (MEMSs) and …