A review of MEMS oscillators for frequency reference and timing applications
MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable
timing devices that can rival the electrical performance of well-established quartz-based …
timing devices that can rival the electrical performance of well-established quartz-based …
Effect of phonon interactions on limiting the fQ product of micromechanical resonators
We discuss the contribution of phonon interactions in determining the upper limit of fQ
product in micromechanical resonators. There is a perception in the MEMS community that …
product in micromechanical resonators. There is a perception in the MEMS community that …
Quantum limit of quality factor in silicon micro and nano mechanical resonators
Micromechanical resonators are promising replacements for quartz crystals for timing and
frequency references owing to potential for compactness, integrability with CMOS fabrication …
frequency references owing to potential for compactness, integrability with CMOS fabrication …
Temperature compensation of silicon resonators via degenerate do**
This paper demonstrates the dependence of temperature coefficient of frequency (TCF) of
silicon micromechanical resonators on charge carrier concentration. TCF compensation is …
silicon micromechanical resonators on charge carrier concentration. TCF compensation is …
Mode-and direction-dependent mechanical energy dissipation in single-crystal resonators due to anharmonic phonon-phonon scattering
SS Iyer, RN Candler - Physical Review Applied, 2016 - APS
In this work, we determine the intrinsic mechanical energy dissipation limit for single-crystal
resonators due to anharmonic phonon-phonon scattering in the Akhiezer (Ω τ≪ 1) regime …
resonators due to anharmonic phonon-phonon scattering in the Akhiezer (Ω τ≪ 1) regime …
MEMS for integrated timing and spectral processing
F Ayazi - 2009 IEEE Custom Integrated Circuits Conference, 2009 - ieeexplore.ieee.org
This paper presents a review of micro-electromechanical devices for frequency references
and RF spectral processing. The application of high-Q pure silicon and AlN-on-silicon bulk …
and RF spectral processing. The application of high-Q pure silicon and AlN-on-silicon bulk …
Low motional impedance distributed lamé mode resonators for high frequency timing applications
This paper presents a novel high-Q silicon distributed Lamé mode resonator (DLR) for VHF
timing reference applications. The DLR employs the nature of shear wave propagation to …
timing reference applications. The DLR employs the nature of shear wave propagation to …
Energy dissipation in micromechanical resonators
Recent years have witnessed breakthrough researches in micro-and nano-mechanical
resonators with small dissipation. Nano-precision micromachining has enabled the …
resonators with small dissipation. Nano-precision micromachining has enabled the …
An empirical phase-noise model for MEMS oscillators operating in nonlinear regime
Nonlinearity of a silicon resonator can lead to improved phase-noise performance in an
oscillator when the phase shift of the sustaining amplifier forces the operating point to a …
oscillator when the phase shift of the sustaining amplifier forces the operating point to a …
A 1.57 mW 99dBΩ CMOS transimpedance amplifier for VHF micromechanical reference oscillators
This work investigates a low-power transimpedance amplifier (TIA) topology suited for VHF
micromechanical oscillator applications. The TIA circuit comprises of a regulated-cascode …
micromechanical oscillator applications. The TIA circuit comprises of a regulated-cascode …