Manufacturing and supply chain management are becoming increasingly important in the
semiconductor industry. Cluster tools are essential equipment in semiconductor production …

The semiconductor manufacturing industry is having a critical upgrade. To meet the new
standards of silicon wafer production and processing, vibration control of wafer handling …

A vibration suppression method using switching control is proposed for smooth motion
control of SCARA robot in wafer transition. The wafer robot is composed of joints integrated …

Currently, the semiconductor manufacturing industries over the world are upgrading from
processing 300mm wafers to processing 450mm wafers. In order to satisfy the requirements …

For smooth operation of SCARA robot for wafer transition, a new method using
magenetorhelogical damper for vibration suppression is proposed. Vibration often occurs …