This paper presents a critical review of the basic data concerning the physics and chemistry
of low pressure SiH4 glow discharges used to deposit hydrogenated amorphous silicon …

I. Atoms and diatomic molecules”. La Rivista del Nuovo Cimento. No. 3, 1996.) This paper
will be referred as (Part I) from now on. Many of these works have produced absolute cross …

The R-matrix method has been widely employed to ab initio calculations on a large variety of
problems related to electron molecule scattering. The UK Molecular R-matrix Code, which …

We present a compilation of recommended positron–molecule cross sections for a range of
scattering processes including elastic scattering, vibrational excitation, discrete electronic …

A new silicon hydride clustering model was developed to study the nucleation of particles in
a low-temperature silane plasma. The model contains neutral silanes, silylenes, silenes and …

Total cross sections for electron scattering have been measured in the 75–4000-eV energy
range for NH 3, SiH 4, and H 2 S. For these gases, as well as for CH 4 and H 2 O, cross …

Absolute differential, integral and momentum transfer cross sections for electron-methane
collisions were determined using a crossed beam spectrometer for impact energies from 1.5 …

Total cross sections (TCSs) for 0.7-400 eV positrons and 1.0-400 eV electrons colliding with
mono-silane (SiH 4) and tetrafluoromethane (CF 4) molecules have been obtained by …

An understanding of the collisions between micro particles is of great importance for the
number of fields belonging to physics, chemistry, astrophysics, biophysics etc. The present …

An overview of the current status in electron collision cross section databases for plasma
modeling is presented. Emphasis is on dissociation, ionization, and dissociative ionization …