Since the discovery of Rochelle salt a century ago, ferroelectric materials have been
investigated extensively due to their robust responses to electric, mechanical, thermal …

High-performance piezoceramics are some of the most important and widely used materials,
and as such research into this topic is at the forefront of high-technology advanced …

An overview of the state of art in ferroelectric thin films is presented. First, we review
applications: microsystems' applications, applications in high frequency electronics, and …

Thin film piezoelectric materials offer a number of advantages in microelectromechanical
systems (MEMS), due to the large motions that can be generated, often with low hysteresis …

Over the past two decades, several advances have been made in micromachined sensors
and actuators. As the field of microelectromechanical systems (MEMS) has advanced, a …

Piezoelectric microelectromechanical systems (MEMS) have been proven to be an attractive
technology for harvesting small magnitudes of energy from ambient vibrations. This …

This paper provides a detailed overview of developments in transducer materials technology
relating to their current and future applications in micro-scale devices. Recent advances in …

Piezoelectric microelectromechanical systems (MEMS) offer the opportunity for high-
sensitivity sensors and large displacement, low-voltage actuators. In particular, recent …

With the rapid development of self‐powered electronics such as wearables, implantable
devices, and sensor networks, there is an increasing demand for power sources that have a …

This review article presents recent advancements in the design and fabrication of thin‐film (<
3 μm) lead zirconate titanate (PZT) microelectromechanical system (MEMS) devices. The …