Advanced scanning probe lithography
The nanoscale control afforded by scanning probe microscopes has prompted the
development of a wide variety of scanning-probe-based patterning methods. Some of these …
development of a wide variety of scanning-probe-based patterning methods. Some of these …
Cantilever-like micromechanical sensors
The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known
technology for label-free sensing which holds promise as a technique for cheap, portable …
technology for label-free sensing which holds promise as a technique for cheap, portable …
Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues
Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …
Nanoscale three-dimensional patterning of molecular resists by scanning probes
For patterning organic resists, optical and electron beam lithography are the most
established methods; however, at resolutions below 30 nanometers, inherent problems …
established methods; however, at resolutions below 30 nanometers, inherent problems …
High-speed multiresolution scanning probe microscopy based on Lissajous scan trajectories
A novel scan trajectory for high-speed scanning probe microscopy is presented in which the
probe follows a two-dimensional Lissajous pattern. The Lissajous pattern is generated by …
probe follows a two-dimensional Lissajous pattern. The Lissajous pattern is generated by …
3-D integration and through-silicon vias in MEMS and microsensors
Z Wang - Journal of Microelectromechanical Systems, 2015 - ieeexplore.ieee.org
After two decades of intensive development, 3-D integration has proven invaluable for
allowing integrated circuits to adhere to Moore's Law without needing to continuously shrink …
allowing integrated circuits to adhere to Moore's Law without needing to continuously shrink …
Rapid turnaround scanning probe nanolithography
Scanning probe nanolithography (SPL) has demonstrated its potential in a variety of
applications like 3D nanopatterning,'direct development'lithography, dip-pen deposition or …
applications like 3D nanopatterning,'direct development'lithography, dip-pen deposition or …
Dual-stage nanopositioning for high-speed scanning probe microscopy
T Tuma, W Haeberle, H Rothuizen… - IEEE/ASME …, 2013 - ieeexplore.ieee.org
This paper presents a dual-stage approach to nanopositioning in which the tradeoff between
the scanner speed and range is addressed by combining a slow, large-range scanner with a …
the scanner speed and range is addressed by combining a slow, large-range scanner with a …
Dynamic superlubricity and the elimination of wear on the nanoscale
One approach to ultrahigh-density data storage involves the use of arrays of atomic force
microscope probes to read and write data on a thin polymer film, but damage to the …
microscope probes to read and write data on a thin polymer film, but damage to the …
Resistance switching at the nanometre scale in amorphous carbon
The electrical transport and resistance switching mechanism in amorphous carbon (aC) is
investigated at the nanoscale. The electrical conduction in aC thin films is shown to be …
investigated at the nanoscale. The electrical conduction in aC thin films is shown to be …