Advanced scanning probe lithography

R Garcia, AW Knoll, E Riedo - Nature nanotechnology, 2014 - nature.com
The nanoscale control afforded by scanning probe microscopes has prompted the
development of a wide variety of scanning-probe-based patterning methods. Some of these …

Cantilever-like micromechanical sensors

A Boisen, S Dohn, SS Keller, S Schmid… - Reports on Progress in …, 2011 - iopscience.iop.org
The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known
technology for label-free sensing which holds promise as a technique for cheap, portable …

Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues

YK Yong, SOR Moheimani, BJ Kenton… - Review of scientific …, 2012 - pubs.aip.org
Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …

Nanoscale three-dimensional patterning of molecular resists by scanning probes

D Pires, JL Hedrick, A De Silva, J Frommer… - Science, 2010 - science.org
For patterning organic resists, optical and electron beam lithography are the most
established methods; however, at resolutions below 30 nanometers, inherent problems …

High-speed multiresolution scanning probe microscopy based on Lissajous scan trajectories

T Tuma, J Lygeros, V Kartik, A Sebastian… - …, 2012 - iopscience.iop.org
A novel scan trajectory for high-speed scanning probe microscopy is presented in which the
probe follows a two-dimensional Lissajous pattern. The Lissajous pattern is generated by …

3-D integration and through-silicon vias in MEMS and microsensors

Z Wang - Journal of Microelectromechanical Systems, 2015 - ieeexplore.ieee.org
After two decades of intensive development, 3-D integration has proven invaluable for
allowing integrated circuits to adhere to Moore's Law without needing to continuously shrink …

Rapid turnaround scanning probe nanolithography

PC Paul, AW Knoll, F Holzner, M Despont… - …, 2011 - iopscience.iop.org
Scanning probe nanolithography (SPL) has demonstrated its potential in a variety of
applications like 3D nanopatterning,'direct development'lithography, dip-pen deposition or …

Dual-stage nanopositioning for high-speed scanning probe microscopy

T Tuma, W Haeberle, H Rothuizen… - IEEE/ASME …, 2013 - ieeexplore.ieee.org
This paper presents a dual-stage approach to nanopositioning in which the tradeoff between
the scanner speed and range is addressed by combining a slow, large-range scanner with a …

Dynamic superlubricity and the elimination of wear on the nanoscale

MA Lantz, D Wiesmann, B Gotsmann - Nature nanotechnology, 2009 - nature.com
One approach to ultrahigh-density data storage involves the use of arrays of atomic force
microscope probes to read and write data on a thin polymer film, but damage to the …

Resistance switching at the nanometre scale in amorphous carbon

A Sebastian, A Pauza, C Rossel, RM Shelby… - New Journal of …, 2011 - iopscience.iop.org
The electrical transport and resistance switching mechanism in amorphous carbon (aC) is
investigated at the nanoscale. The electrical conduction in aC thin films is shown to be …