Microwave acoustic devices: Recent advances and outlook

S Gong, R Lu, Y Yang, L Gao… - IEEE Journal of …, 2021 - ieeexplore.ieee.org
This paper presents a short review of the microwave acoustics area, where exciting material
innovations and performance advancements have been made in the past decade. The ever …

Piezoelectric MEMS—Evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

X Le, Q Shi, P Vachon, EJ Ng… - Journal of Micromechanics …, 2021 - iopscience.iop.org
The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …

Compact and wideband nanoacoustic pass-band filters for future 5G and 6G cellular radios

G Giribaldi, L Colombo, P Simeoni, M Rinaldi - nature communications, 2024 - nature.com
Over recent years, the surge in mobile communication has deepened global connectivity.
With escalating demands for faster data rates, the push for higher carrier frequencies …

Toward Ka band acoustics: Lithium niobate asymmetrical mode piezoelectric MEMS resonators

Y Yang, R Lu, T Manzaneque… - 2018 IEEE International …, 2018 - ieeexplore.ieee.org
This work presents a new class of micro-electro-mechanical system (MEMS) resonators
toward Ka band (26.5-40 GHz) for fifth-generation (5G) wireless communication. Resonant …

Piezoelectric MEMS resonators: A review

G Pillai, SS Li - IEEE Sensors Journal, 2020 - ieeexplore.ieee.org
Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …

5 GHz lithium niobate MEMS resonators with high FoM of 153

Y Yang, A Gao, R Lu, S Gong - 2017 IEEE 30th International …, 2017 - ieeexplore.ieee.org
This paper reports on the demonstration of a new class of super-high frequency (SHF)
microelectromechanical system (MEMS) resonators operating in the 5 GHz range. SHF …

RF acoustic microsystems based on suspended lithium niobate thin films: Advances and outlook

R Lu, S Gong - Journal of Micromechanics and Microengineering, 2021 - iopscience.iop.org
This paper presents a review of the radio frequency thin-film lithium niobate (LiNbO 3) based
acoustic microsystems. Thanks to their high electromechanical coupling (k 2), low loss, and …

High Antisymmetric Mode Lithium Niobate MEMS Resonators With Spurious Mitigation

Y Yang, R Lu, S Gong - Journal of Microelectromechanical …, 2020 - ieeexplore.ieee.org
This paper reports on the demonstrations of first-order antisymmetric Lamb wave (A1) mode
resonator as a new platform for front-end filtering of the fifth-generation (5G) wireless …

10–60-GHz electromechanical resonators using thin-film lithium niobate

Y Yang, R Lu, L Gao, S Gong - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
This work presents a new class of microelectromechanical system (MEMS) resonator toward
60 GHz for the fifth-generation (5G) wireless communications. The wide range of the …

Interdigital transducers on a piezoelectric thin-film for signal compression

S Gong, R Lu, TM Garcia - US Patent 11,451,209, 2022 - Google Patents
A piezoelectric thin-film suspended above a carrier substrate. An input interdigital transducer
(IDT) having first interdigitated electrodes is disposed at different locations along the …