Microwave acoustic devices: Recent advances and outlook
This paper presents a short review of the microwave acoustics area, where exciting material
innovations and performance advancements have been made in the past decade. The ever …
innovations and performance advancements have been made in the past decade. The ever …
Piezoelectric MEMS—Evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era
The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …
Compact and wideband nanoacoustic pass-band filters for future 5G and 6G cellular radios
Over recent years, the surge in mobile communication has deepened global connectivity.
With escalating demands for faster data rates, the push for higher carrier frequencies …
With escalating demands for faster data rates, the push for higher carrier frequencies …
Toward Ka band acoustics: Lithium niobate asymmetrical mode piezoelectric MEMS resonators
This work presents a new class of micro-electro-mechanical system (MEMS) resonators
toward Ka band (26.5-40 GHz) for fifth-generation (5G) wireless communication. Resonant …
toward Ka band (26.5-40 GHz) for fifth-generation (5G) wireless communication. Resonant …
Piezoelectric MEMS resonators: A review
Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …
5 GHz lithium niobate MEMS resonators with high FoM of 153
This paper reports on the demonstration of a new class of super-high frequency (SHF)
microelectromechanical system (MEMS) resonators operating in the 5 GHz range. SHF …
microelectromechanical system (MEMS) resonators operating in the 5 GHz range. SHF …
RF acoustic microsystems based on suspended lithium niobate thin films: Advances and outlook
This paper presents a review of the radio frequency thin-film lithium niobate (LiNbO 3) based
acoustic microsystems. Thanks to their high electromechanical coupling (k 2), low loss, and …
acoustic microsystems. Thanks to their high electromechanical coupling (k 2), low loss, and …
High Antisymmetric Mode Lithium Niobate MEMS Resonators With Spurious Mitigation
This paper reports on the demonstrations of first-order antisymmetric Lamb wave (A1) mode
resonator as a new platform for front-end filtering of the fifth-generation (5G) wireless …
resonator as a new platform for front-end filtering of the fifth-generation (5G) wireless …
10–60-GHz electromechanical resonators using thin-film lithium niobate
This work presents a new class of microelectromechanical system (MEMS) resonator toward
60 GHz for the fifth-generation (5G) wireless communications. The wide range of the …
60 GHz for the fifth-generation (5G) wireless communications. The wide range of the …
Interdigital transducers on a piezoelectric thin-film for signal compression
A piezoelectric thin-film suspended above a carrier substrate. An input interdigital transducer
(IDT) having first interdigitated electrodes is disposed at different locations along the …
(IDT) having first interdigitated electrodes is disposed at different locations along the …