A review comparing cathodic arcs and high power impulse magnetron sputtering (HiPIMS)

A Anders - Surface and Coatings Technology, 2014‏ - Elsevier
High power impulse magnetron sputtering (HiPIMS) has been at the center of attention over
the last years as it is an emerging physical vapor deposition (PVD) technology that …

High-power impulse magnetron sputter deposition of TiBx thin films: Effects of pressure and growth temperature

N Hellgren, J Thörnberg, I Zhirkov, MA Sortica, I Petrov… - Vacuum, 2019‏ - Elsevier
Titanium boride, TiB x, thin films are grown in pure Ar discharges by high-power impulse
magnetron sputtering (HiPIMS) from a compound TiB 2 target. Film compositions are …

[HTML][HTML] Insights into surface modification and erosion of multi-element arc cathodes using a novel multilayer cathode design

M Golizadeh, A Anders, F Mendez Martin… - Journal of applied …, 2020‏ - pubs.aip.org
Nowadays, multi-element cathodes are frequently employed to grow multi-element thin films
and coatings using cathodic arc deposition processes. During cathode erosion, the cathode …

[HTML][HTML] Determination of effective Ga/N ratio to control GaN growth behavior in liquid-target reactive magnetron sputter epitaxy

YL Lo, A Prabaswara, JC Chang, S Bairagi… - Materials Science in …, 2024‏ - Elsevier
The optimization of magnetron sputter epitaxy (MSE) for the high-volume production of high-
quality GaN films is increasingly important. This study concerns the influence of key MSE …

[HTML][HTML] Dense and hard TiWC protective coatings grown with tungsten ion irradiation using WC-HiPIMS/TiC-DCMS co-sputtering technique without external heating

TW Hsu, G Greczynski, R Boyd, S Kolozsvári… - Applied Surface …, 2023‏ - Elsevier
Titanium tungsten carbide (TiWC) coatings are deposited by a combined high-power
impulse and dc magnetron co-sputtering (HiPIMS/DCMS) technique. No external heating is …

Charge state, angular distribution, and kinetic energy of ions from multicomponent-cathodes in vacuum arc devices

AG Nikolaev, EM Oks, KP Savkin, GY Yushkov… - Journal of Applied …, 2014‏ - pubs.aip.org
We present research results on vacuum arc plasma produced with multicomponent cathode
made of several different elements. The ion mass-to-charge-state spectra of the plasmas …

Effect of cathode composition and nitrogen pressure on macroparticle generation and type of arc discharge in a DC arc source with Ti–Al compound cathodes

I Zhirkov, A Petruhins, J Rosén - Surface and Coatings Technology, 2015‏ - Elsevier
Thin films deposited with unfiltered DC arc plasma from Ti, Ti 0.75 Al 0.25, Ti 0.50 Al 0.50, Ti
0.30 Al 0.70, and Al cathodes were characterized with a scanning electron microscope for …

[HTML][HTML] Cathode spot behavior in nitrogen and oxygen gaseous atmospheres and concomitant cathode surface modifications

M Golizadeh, FM Martin, S Kolozsvári, A Anders… - Surface and Coatings …, 2021‏ - Elsevier
The cathode spot behavior influences the arc plasma chemistry and film growth conditions
during reactive cathodic arc deposition of nitride and oxide films. Cathode spots can be …

[HTML][HTML] Stable DC vacuum arc plasma generation from a 100 mm TiB2 cathode

I Zhirkov, A Petruhins, P Polcik, S Kolozsvári… - Surface and Coatings …, 2024‏ - Elsevier
Titanium diboride exhibits outstanding properties for hard and wear resistant coatings.
However, efficient physical vapor deposition (PVD) processing through DC vacuum arc, with …

Study of ion separation mechanism in the multi-component vacuum arc discharge

Q Sun, Q Zhou, H Zhang, W Yang… - … Sources Science and …, 2022‏ - iopscience.iop.org
The separation phenomenon of light and heavy ions was widely observed experimentally in
the vacuum arc discharge with multi-component composite cathode. In this work, a two …