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A review comparing cathodic arcs and high power impulse magnetron sputtering (HiPIMS)
High power impulse magnetron sputtering (HiPIMS) has been at the center of attention over
the last years as it is an emerging physical vapor deposition (PVD) technology that …
the last years as it is an emerging physical vapor deposition (PVD) technology that …
High-power impulse magnetron sputter deposition of TiBx thin films: Effects of pressure and growth temperature
Titanium boride, TiB x, thin films are grown in pure Ar discharges by high-power impulse
magnetron sputtering (HiPIMS) from a compound TiB 2 target. Film compositions are …
magnetron sputtering (HiPIMS) from a compound TiB 2 target. Film compositions are …
[HTML][HTML] Insights into surface modification and erosion of multi-element arc cathodes using a novel multilayer cathode design
Nowadays, multi-element cathodes are frequently employed to grow multi-element thin films
and coatings using cathodic arc deposition processes. During cathode erosion, the cathode …
and coatings using cathodic arc deposition processes. During cathode erosion, the cathode …
[HTML][HTML] Determination of effective Ga/N ratio to control GaN growth behavior in liquid-target reactive magnetron sputter epitaxy
The optimization of magnetron sputter epitaxy (MSE) for the high-volume production of high-
quality GaN films is increasingly important. This study concerns the influence of key MSE …
quality GaN films is increasingly important. This study concerns the influence of key MSE …
[HTML][HTML] Dense and hard TiWC protective coatings grown with tungsten ion irradiation using WC-HiPIMS/TiC-DCMS co-sputtering technique without external heating
Titanium tungsten carbide (TiWC) coatings are deposited by a combined high-power
impulse and dc magnetron co-sputtering (HiPIMS/DCMS) technique. No external heating is …
impulse and dc magnetron co-sputtering (HiPIMS/DCMS) technique. No external heating is …
Charge state, angular distribution, and kinetic energy of ions from multicomponent-cathodes in vacuum arc devices
We present research results on vacuum arc plasma produced with multicomponent cathode
made of several different elements. The ion mass-to-charge-state spectra of the plasmas …
made of several different elements. The ion mass-to-charge-state spectra of the plasmas …
Effect of cathode composition and nitrogen pressure on macroparticle generation and type of arc discharge in a DC arc source with Ti–Al compound cathodes
Thin films deposited with unfiltered DC arc plasma from Ti, Ti 0.75 Al 0.25, Ti 0.50 Al 0.50, Ti
0.30 Al 0.70, and Al cathodes were characterized with a scanning electron microscope for …
0.30 Al 0.70, and Al cathodes were characterized with a scanning electron microscope for …
[HTML][HTML] Cathode spot behavior in nitrogen and oxygen gaseous atmospheres and concomitant cathode surface modifications
The cathode spot behavior influences the arc plasma chemistry and film growth conditions
during reactive cathodic arc deposition of nitride and oxide films. Cathode spots can be …
during reactive cathodic arc deposition of nitride and oxide films. Cathode spots can be …
[HTML][HTML] Stable DC vacuum arc plasma generation from a 100 mm TiB2 cathode
Titanium diboride exhibits outstanding properties for hard and wear resistant coatings.
However, efficient physical vapor deposition (PVD) processing through DC vacuum arc, with …
However, efficient physical vapor deposition (PVD) processing through DC vacuum arc, with …
Study of ion separation mechanism in the multi-component vacuum arc discharge
The separation phenomenon of light and heavy ions was widely observed experimentally in
the vacuum arc discharge with multi-component composite cathode. In this work, a two …
the vacuum arc discharge with multi-component composite cathode. In this work, a two …