Electromigration in submicron interconnect features of integrated circuits

H Ceric, S Selberherr - Materials Science and Engineering: R: Reports, 2011‏ - Elsevier
Electromigration (EM) is a complex multiphysics problem including electrical, thermal, and
mechanical aspects. Since the first work on EM was published in 1907, extensive studies on …

Physically based models of electromigration: From Black's equation to modern TCAD models

RL De Orio, H Ceric, S Selberherr - Microelectronics Reliability, 2010‏ - Elsevier
Electromigration failure is a major reliability concern for integrated circuits. The continuous
shrinking of metal line dimensions together with the interconnect structure arranged in many …

[HTML][HTML] Coupling model of electromigration and experimental verification–Part I: Effect of atomic concentration gradient

Z Cui, X Fan, Y Zhang, S Vollebregt, J Fan… - Journal of the Mechanics …, 2023‏ - Elsevier
This paper presented integrated electromigration (EM) studies through experiment, theory,
and simulation. First, extensive EM tests were performed using Blech and standard wafer …

Modeling of electromigration in through-silicon-via based 3D IC

J Pak, M Pathak, SK Lim, DZ Pan - 2011 IEEE 61st Electronic …, 2011‏ - ieeexplore.ieee.org
Electromigration (EM) is a critical problem for interconnect reliability of modern IC design,
especially as the feature size becomes smaller. In 3D IC technology, the EM problem …

[HTML][HTML] Coupling model of electromigration and experimental verification–Part II: Impact of thermomigration

Z Cui, X Fan, Y Zhang, S Vollebregt, J Fan… - Journal of the Mechanics …, 2023‏ - Elsevier
This paper presented a comprehensive experimental and simulation study for
thermomigration (TM) accompanying electromigration (EM) at elevated current densities …

Electromigration-induced void evolution and failure of Cu/SiCN hybrid bonds

H Ceric, H Zahedmanesh, K Croes… - Journal of Applied …, 2023‏ - pubs.aip.org
The realization of high interconnect densities for three-dimensional integration demands
development of new wafer-to-wafer bonding approaches. Recently introduced Cu-to-Cu …

Investigating the electromigration limits of Cu nano-interconnects using a novel hybrid physics-based model

H Zahedmanesh, O Varela Pedreira, Z Tőkei… - Journal of Applied …, 2019‏ - pubs.aip.org
To predict the impact of technological variables such as materials, dimensions, interfaces,
and operating conditions on Cu electromigration, in this study a hybrid modeling framework …

Electromigration modeling and full-chip reliability analysis for BEOL interconnect in TSV-based 3D ICs

M Pathak, J Pak, DZ Pan, SK Lim - 2011 IEEE/ACM …, 2011‏ - ieeexplore.ieee.org
Electromigration (EM) is a critical problem for interconnect reliability of modern integrated
circuits (ICs), especially as the feature size becomes smaller. In three-dimensional (3D) IC …

Modeling methods for analysis of electromigration degradation in nano-interconnects

H Ceric, S Selberherr, H Zahedmanesh… - ECS Journal of Solid …, 2021‏ - iopscience.iop.org
Mitigation of the degradation for down-scaled interconnects requires an in-depth
understanding of the failure mechanisms of electromigration and, therefore, the …

Grain boundaries-dominated migration failure of copper interconnect under multiphysics field: Insight from theoretical modeling and finite element analysis

Y Zhu, H Bao, Z Yang, H Jiang, F Ma - Microelectronics Reliability, 2024‏ - Elsevier
As the feature size of Cu interconnects in microelectronic devices are miniaturized into micro-
and even nano-scale, the effects of grain boundaries (GBs) on the electromigration (EM) …