Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
Atomic layer deposition (ALD) is gaining attention as a thin film deposition method, uniquely
suitable for depositing uniform and conformal films on complex three-dimensional …
suitable for depositing uniform and conformal films on complex three-dimensional …
Extremely low temperature growth of ZnO by atomic layer deposition
We report on the zinc oxide (ZnO) thin films obtained by the atomic layer deposition (ALD)
method using diethyl zinc and water precursors, which allowed us to lower deposition …
method using diethyl zinc and water precursors, which allowed us to lower deposition …
Magnetic and optical properties of Co-doped ZnO nanocrystalline particles
We carried out a systematic study on the effect of Co do** on the structural, magnetic and
optical properties of ZnO nanocrystalline particles, using x-ray diffraction, x-ray …
optical properties of ZnO nanocrystalline particles, using x-ray diffraction, x-ray …
Zinc oxide for electronic, photovoltaic and optoelectronic applications
We show that the atomic layer deposition (ALD) technique has great potential for
widespread use in the production of ZnO films for applications in electronic, photovoltaic …
widespread use in the production of ZnO films for applications in electronic, photovoltaic …
Controlling of preferential growth mode of ZnO thin films grown by atomic layer deposition
A method of controlling a preferred orientation of ZnO thin films grown by Atomic Layer
Deposition (ALD) is discussed. The results for ALD films grown at low temperature with zinc …
Deposition (ALD) is discussed. The results for ALD films grown at low temperature with zinc …
Structural and optical properties of (Zn, Mn) O thin films prepared by atomic layer deposition
This paper investigates manganese-doped zinc oxide (ZnMnO) thin films grown using the
atomic layer deposition (ALD) technique. ZnO and MnO layers were deposited alternatively …
atomic layer deposition (ALD) technique. ZnO and MnO layers were deposited alternatively …
Direct atomic layer deposition of ternary ferrites with various magnetic properties
YT Chong, EMY Yau, K Nielsch… - Chemistry of …, 2010 - ACS Publications
Thin films of the ternary oxides nickel ferrite and cobalt ferrite are created by atomic layer
deposition (ALD) from the metallocenes and ozone. Their chemical stoichiometry and …
deposition (ALD) from the metallocenes and ozone. Their chemical stoichiometry and …
Homogeneous and heterogeneous magnetism in (Zn, Co) O: From a random antiferromagnet to a dipolar superferromagnet by changing the growth temperature
A series of (Zn, Co) O layers with Co contents x up to 40% grown by atomic layer deposition
have been investigated. All structures deposited at 160∘ C show magnetic properties …
have been investigated. All structures deposited at 160∘ C show magnetic properties …
Structural and optical properties of low-temperature ZnO films grown by atomic layer deposition with diethylzinc and water precursors
IA Kowalik, E Guziewicz, K Kopalko, S Yatsunenko… - Journal of crystal …, 2009 - Elsevier
We report on properties of low-temperature (LT) ZnO films grown by the atomic layer
deposition method with diethylzinc (DEZn) precursor. It is shown that the ZnO thin film …
deposition method with diethylzinc (DEZn) precursor. It is shown that the ZnO thin film …
Solvothermal synthesis of nanocrystalline zinc oxide doped with Mn2+, Ni2+, Co2+ and Cr3+ ions
ZnO nanopowders doped with Mn 2+, Ni 2+, Co 2+ and Cr 3+ ions have been synthesised
for the first time using a solvothermal reaction with microwave heating. The nanopowders …
for the first time using a solvothermal reaction with microwave heating. The nanopowders …