Epitaxial growth of cobalt oxide thin films on sapphire substrates using atmospheric pressure mist chemical vapor deposition

HG Chen, HS Wang, SR Jian, TL Yeh, JY Feng - Coatings, 2023 - mdpi.com
This study demonstrated the epitaxial growth of single-phase (111) CoO and (111) Co3O4
thin films on a-plane sapphire substrates using an atmospheric pressure mist chemical …

High-performance zinc tin oxide semiconductor grown by atmospheric-pressure mist-CVD and the associated thin-film transistor properties

J Park, KT Oh, DH Kim, HJ Jeong, YC Park… - … Applied Materials & …, 2017 - ACS Publications
Zinc tin oxide (Zn–Sn–O, or ZTO) semiconductor layers were synthesized based on solution
processes, of which one type involves the conventional spin coating method and the other is …

The carbon quantum dots modified ZnO/TiO2 nanotube heterojunction and its visible light photocatalysis enhancement

M Zhu, X Deng, X Lin, L Zhang, W Zhang, Y Lv… - Journal of Materials …, 2018 - Springer
The carbon quantum dots modified ZnO/TiO 2 nanotube heterojunction is synthesized via
simple electrospinning–hydrothermal method. The results of SEM, XRD, TEM, FT-IR and …

Structural and optical properties of hexagonal ZnO nanostructures grown by ultrasonic spray CVD

P Narin, E Kutlu, G Atmaca, A Atilgan, A Yildiz… - Optik, 2018 - Elsevier
In this paper, the growth, structural and optical properties of the hexagonal ZnO
nanostructures grown by Ultrasonic Spray Chemical Vapor Deposition (USCVD) method at …

Influence of precursor concentration and growth time on the surface morphology and crystallinity of α-Ga2O3 thin films fabricated by mist chemical vapor deposition

Y Nakabayashi, S Yamada, S Itoh… - Journal of the Ceramic …, 2018 - jstage.jst.go.jp
Recently, wide-bandgap (WBG) 1) 3) semiconductors such as silicon carbide4) and gallium
nitride5) have been used in various electronic devices. These WBG semiconductors have …

The Influence of the Growth Temperature on the Structural Properties of {CdO/ZnO}30 Superlattices

A Lysak, E Przezdziecka, A Wierzbicka… - Crystal Growth & …, 2022 - ACS Publications
The {ZnO/CdO} 30 superlattices (SLs) series were grown at different temperatures (350–
550° C) on m-plane Al2O3 substrates by molecular beam epitaxy. The structural properties …

Structural characteristics of a non-polar ZnS layer on a ZnO buffer layer formed on a sapphire substrate by mist chemical vapor deposition

K Okita, K Inaba, Z Yatabe… - Japanese Journal of …, 2018 - iopscience.iop.org
ZnS is attractive as a material for low-cost light-emitting diodes. In this study, a non-polar
ZnS layer was epitaxially grown on a sapphire substrate by inserting a ZnO buffer layer …

Interface state density in mist chemical vapor deposited Al2O3/AlGaN/GaN structure

K Bito, M Ishiguro, HA Radzuan… - Japanese Journal of …, 2024 - iopscience.iop.org
Uniform thickness Al 2 O 3 thin films have been deposited by eco-friendly mist CVD. The
obtained Al 2 O 3 film has an optical band gap value of more than 6.5 eV and a refractive …

Synthesis and characterization of mist chemical vapor deposited aluminum titanium oxide films

Z Yatabe, K Nishiyama, T Tsuda… - Japanese Journal of …, 2019 - iopscience.iop.org
Aluminum titanium oxide (Al 1–x Ti x O y, an alloy of Al 2 O 3 and TiO 2), an attractive high-κ
dielectric material, was synthesized by mist chemical vapor deposition, utilizing Al 2 O 3 and …

Facile synthesis of AlOx dielectrics via mist-CVD based on aqueous solutions

KT Oh, H Kim, D Kim, JH Han, J Park, JS Park - Ceramics International, 2017 - Elsevier
Aluminum oxide (AlO x) thin films were synthesized by mist-chemical vapor deposition (mist-
CVD) using aluminum acetylacetonate (Al (acac) 3) dissolved in an aqueous solvent mixture …