In semiconductor manufacturing, cluster tools tend to integrate a vacuum module (VM), a
loadlock module (LLM), and an equipment front-end module (EFEM). While scheduling …

Semiconductor manufacturing widely employs cluster tools that comprise three critical
components: a vacuum module (VM), a loadlock module (LLM), and an equipment front-end …

As a computer-integrated manufacturing system, cluster tools are widely used for
semiconductor manufacturing. To tackle their scheduling problems with parallel processing …

We address the scheduling problem of single-armed cluster tools that concurrently process
two wafer types without assuming cyclic scheduling. These cluster tools, consisting of …

Multi-cluster tools are increasingly being adopted for wafer production in semiconductor
fabrications. The current paper deals with single-armed linear multi-cluster tools connected …

With the development of industrial manufacturing, flexible manufacturing system provides an
effective way to improve the machining quality and efficiency, as well as reduce the …

With the increasing demand for customization, flow shop scheduling tends to process multi-
variety small batch products. Thus, there are frequent switches between batches. Frequent …

Multi-cluster tools are widely utilized in wafer fabrications. It is of great significance to
schedule such tools optimally to improve productivity and ensure wafer quality. However …