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Photonic Damascene process for integrated high-Q microresonator based nonlinear photonics
MHP Pfeiffer, A Kordts, V Brasch, M Zervas… - Optica, 2016 - opg.optica.org
High confinement, integrated silicon nitride (SiN) waveguides have recently emerged as an
attractive platform for on-chip nonlinear optical devices. The fabrication of high-Q SiN …
attractive platform for on-chip nonlinear optical devices. The fabrication of high-Q SiN …
Subpicosecond optical pulse compression via an integrated nonlinear chirper
Photonic integrated circuits (PICs) capable of ultra-fast, signal processing are recognized as
being fundamental for future applications involving ultra-short optical pulse propagation …
being fundamental for future applications involving ultra-short optical pulse propagation …
High confinement micron-scale silicon nitride high Q ring resonator
High confinement micron-scale silicon nitride high Q ring resonator clickable element to
expand a topic LOGIN OR CREATE ACCOUNT PRISM SUBMISSION This website uses …
expand a topic LOGIN OR CREATE ACCOUNT PRISM SUBMISSION This website uses …
Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides for microphotonic devices
We demonstrate amorphous and polycrystalline anatase TiO_2 thin films and
submicrometer-wide waveguides with promising optical properties for microphotonic …
submicrometer-wide waveguides with promising optical properties for microphotonic …
Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties
This paper presents work aimed at optimizing the fabrication of silicon nitride Si_xN_y thin-
film visible-light planar waveguides using plasma-enhanced chemical vapour deposition …
film visible-light planar waveguides using plasma-enhanced chemical vapour deposition …
Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications
SiN x layers intended for photonic applications are typically fabricated using LPCVD and
PECVD. These techniques rely on high-temperature processing (> 400 C) to obtain low …
PECVD. These techniques rely on high-temperature processing (> 400 C) to obtain low …
Sub-ppm nanomechanical absorption spectroscopy of silicon nitride
Material absorption is a key limitation in nanophotonic systems; however, its characterization
is often obscured by scattering and diffraction. Here we show that nanomechanical …
is often obscured by scattering and diffraction. Here we show that nanomechanical …
Low propagation loss SiN optical waveguide prepared by optimal low-hydrogen module
We investigated low-hydrogen SiN films prepared by a low temperature (350° C) PECVD
method. The impact of SiH_4/N_2 flow ratio and radio frequency power on the hydrogen …
method. The impact of SiH_4/N_2 flow ratio and radio frequency power on the hydrogen …
Low loss GaN waveguides at the visible spectral wavelengths for integrated photonics applications
We perform comprehensive studies on the fundamental loss mechanisms in III-nitride
waveguides in the visible spectral region. Theoretical analysis shows that free carrier loss …
waveguides in the visible spectral region. Theoretical analysis shows that free carrier loss …
Dispersion engineered silicon nitride waveguides by geometrical and refractive-index optimization
JM Chavez Boggio, D Bodenmüller… - Journal of the Optical …, 2014 - opg.optica.org
Dispersion engineering in silicon nitride (Si_XN_Y) waveguides is investigated through the
optimization of the waveguide transversal dimensions and refractive indices in a …
optimization of the waveguide transversal dimensions and refractive indices in a …