Photonic Damascene process for integrated high-Q microresonator based nonlinear photonics

MHP Pfeiffer, A Kordts, V Brasch, M Zervas… - Optica, 2016 - opg.optica.org
High confinement, integrated silicon nitride (SiN) waveguides have recently emerged as an
attractive platform for on-chip nonlinear optical devices. The fabrication of high-Q SiN …

Subpicosecond optical pulse compression via an integrated nonlinear chirper

M Peccianti, M Ferrera, L Razzari, R Morandotti… - Optics …, 2010 - opg.optica.org
Photonic integrated circuits (PICs) capable of ultra-fast, signal processing are recognized as
being fundamental for future applications involving ultra-short optical pulse propagation …

High confinement micron-scale silicon nitride high Q ring resonator

A Gondarenko, JS Levy, M Lipson - Optics express, 2009 - opg.optica.org
High confinement micron-scale silicon nitride high Q ring resonator clickable element to
expand a topic LOGIN OR CREATE ACCOUNT PRISM SUBMISSION This website uses …

Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides for microphotonic devices

JDB Bradley, CC Evans, JT Choy, O Reshef… - Optics express, 2012 - opg.optica.org
We demonstrate amorphous and polycrystalline anatase TiO_2 thin films and
submicrometer-wide waveguides with promising optical properties for microphotonic …

Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties

A Gorin, A Jaouad, E Grondin, V Aimez, P Charette - Optics Express, 2008 - opg.optica.org
This paper presents work aimed at optimizing the fabrication of silicon nitride Si_xN_y thin-
film visible-light planar waveguides using plasma-enhanced chemical vapour deposition …

Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications

TD Bucio, AZ Khokhar, C Lacava… - Journal of Physics D …, 2016 - iopscience.iop.org
SiN x layers intended for photonic applications are typically fabricated using LPCVD and
PECVD. These techniques rely on high-temperature processing (> 400 C) to obtain low …

Sub-ppm nanomechanical absorption spectroscopy of silicon nitride

AT Land, M Dey Chowdhury, AR Agrawal… - Nano Letters, 2024 - ACS Publications
Material absorption is a key limitation in nanophotonic systems; however, its characterization
is often obscured by scattering and diffraction. Here we show that nanomechanical …

Low propagation loss SiN optical waveguide prepared by optimal low-hydrogen module

SC Mao, SH Tao, YL Xu, XW Sun, MB Yu, GQ Lo… - Optics express, 2008 - opg.optica.org
We investigated low-hydrogen SiN films prepared by a low temperature (350° C) PECVD
method. The impact of SiH_4/N_2 flow ratio and radio frequency power on the hydrogen …

Low loss GaN waveguides at the visible spectral wavelengths for integrated photonics applications

H Chen, H Fu, X Huang, X Zhang, TH Yang… - Optics express, 2017 - opg.optica.org
We perform comprehensive studies on the fundamental loss mechanisms in III-nitride
waveguides in the visible spectral region. Theoretical analysis shows that free carrier loss …

Dispersion engineered silicon nitride waveguides by geometrical and refractive-index optimization

JM Chavez Boggio, D Bodenmüller… - Journal of the Optical …, 2014 - opg.optica.org
Dispersion engineering in silicon nitride (Si_XN_Y) waveguides is investigated through the
optimization of the waveguide transversal dimensions and refractive indices in a …