Rib channel waveguides were produced with the application of chemical wet etching of the
sol-gel derived silica–titania (SiO 2–TiO 2) waveguide films. The silica–titania films were …

Massive irreversible increases in tensile stress (up to 2 GPa) on thermal cycling are
demonstrated for plasma-enhanced chemical vapor deposited (PECVD) silicon nitride films …

The results of the fabrication and characterization of silicon oxynitride films deposited by the
plasma-enhanced chemical vapor deposition (PECVD) technique at low temperature and …

Optical waveguides (WGs) are widely used as interconnects in integrated optical circuits
both for telecommunication and sensing applications. There are different kind of optical WG …

In this work, we report studies on the residual stress and structure of silicon oxynitride films
deposited by PECVD with nitrogen atomic percent varying from 24 to 55. The stress …

We have investigated the SiOxNy films obtained by plasma enhanced chemical vapor
deposition (PECVD) technique at low temperature using nitrous oxide (N2O), nitrogen (N2) …

The field of chemical and biosensors based on waveguide technology is rapidly growing,
with new developments focusing on higher sensitivity and stability. This key demand is …

In this work we present the results of studies on the deposition and characterization of silicon
oxynitride films deposited by plasma enhanced chemical vapor deposition technique using …

US7003188B2 - Low loss optical switching system - Google Patents US7003188B2 - Low loss
optical switching system - Google Patents Low loss optical switching system Download PDF …

This improved method and apparatus for switching optical signals uses a rotatable optically
transmissive microstructure to change the optical paths of optical signals. The rotatable …