Piezo-actuated stages have become more and more promising in nanopositioning
applications due to the excellent advantages of the fast response time, large mechanical …

Position sensors with nanometer resolution are a key component of many precision imaging
and fabrication machines. Since the sensor characteristics can define the linearity …

Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …

Smart actuators employed in micropositioning are known to exhibit strong hysteresis
nonlinearities, which may be asymmetric and could adversely affect the positioning …

This paper presents a modified Prandtl-Ishlinskii (PI)(MPI) model for the asymmetric
hysteresis description and compensation of piezoelectric actuators. Considering the fact that …

The development of a high-performance three-axis serial-kinematic nanopositioning stage is
presented. The stage is designed for high-bandwidth applications that include video-rate …

Piezoelectric actuators are gradually playing an important role in precision positioning
applications due to their extremely fine resolution, fast responses, and large actuating …

This paper presents the design, analysis, and verification of a new output-based digital
integral terminal sliding mode predictive control (DITSMPC) scheme, which is dedicated to …

Piezomicropositioning actuators, which are widely used in micropositioning applications,
exhibit strong rate-dependent hysteresis nonlinearities that affect the accuracy of these …

Precise actuation is a widely utilized technology in the realm of high-end equipment.
Piezoelectric actuators (PEAs) stand out due to their exceptional attributes, including high …