Emergent ferroelectricity in subnanometer binary oxide films on silicon

SS Cheema, N Shanker, SL Hsu, Y Rho, CH Hsu… - Science, 2022 - science.org
The critical size limit of voltage-switchable electric dipoles has extensive implications for
energy-efficient electronics, underlying the importance of ferroelectric order stabilized at …

Microstructural evolution and ferroelectricity in HfO2 films

D Zhao, Z Chen, X Liao - Microstructures, 2022 - ira.lib.polyu.edu.hk
Ferroelectric (FE) materials, which typically adopt the perovskite structure with non-
centrosymmetry and exhibit spontaneous polarization, are promising for applications in …

Polarization Switching and Correlated Phase Transitions in Fluorite‐Structure ZrO2 Nanocrystals

X Li, H Zhong, T Lin, F Meng, A Gao, Z Liu… - Advanced …, 2023 - Wiley Online Library
Unconventional ferroelectricity in fluorite‐structure oxides enables tremendous opportunities
in nanoelectronics owing to their superior scalability and silicon compatibility. However, their …

Influence of Biaxial Strain and Interfacial Layer Growth on Ferroelectric Wake-Up and Phase Transition Fields in ZrO2

B Xu, R Ganser, KM Holsgrove, X Wang… - … Applied Materials & …, 2024 - ACS Publications
Investigations on fluorite-structured ferroelectric HfO2/ZrO2 thin films are aiming to achieve
high-performance films required for memory and computing technologies. These films …

A robust high-performance electronic synapse based on epitaxial ferroelectric Hf0. 5Zr0. 5O2 films with uniform polarization and high Curie temperature

Y Wang, Q Wang, J Zhao, T Niermann, Y Liu, L Dai… - Applied Materials …, 2022 - Elsevier
Ferroelectric tunnel junction (FTJ) is a promising emerging memristor for the artificial
synapse in neuro-inspired computing, which has parallel data processing and low power …

Ferroelectric Orthorhombic ZrO2 Thin Films Achieved Through Nanosecond Laser Annealing

APS Crema, MC Istrate, A Silva, V Lenzi… - Advanced …, 2023 - Wiley Online Library
A new approach for the stabilization of the ferroelectric orthorhombic ZrO2 films is
demonstrated through nanosecond laser annealing (NLA) of as‐deposited Si/SiOx/W (14 …

Symmetry Engineering of Epitaxial Hf0.5Zr0.5O2 Ultrathin Films

A De, MH Jung, YH Kim, SB Bae… - … Applied Materials & …, 2024 - ACS Publications
Robust ferroelectricity in HfO2-based ultrathin films has the potential to revolutionize
nonvolatile memory applications in nanoscale electronic devices because of their …

Influence of Si-Do** on 45 nm Thick Ferroelectric ZrO2 Films

B Xu, PD Lomenzo, A Kersch, T Mikolajick… - ACS Applied …, 2022 - ACS Publications
In the last decades, ferroelectricity has been discovered in Si-doped HfO2 and Hf1–x Zr x O2
thin films, and the origin of ferroelectricity is considered to be the presence of the polar Pca …

Crystallographic structure and ferroelectricity of epitaxial hafnium oxide thin films

SK Lee, CW Bark - Journal of the Korean Ceramic Society, 2022 - Springer
Devices using silicon-based materials have been studied and developed by the
semiconductor industry. With silicon-based materials reaching their performance limit, there …

Influence of the Ozone Dose Time during Atomic Layer Deposition on the Ferroelectric and Pyroelectric Properties of 45 nm-Thick ZrO2 Films

B Xu, L Collins, KM Holsgrove… - ACS Applied …, 2023 - ACS Publications
Over a decade ago, ferroelectricity was discovered in doped HfO2 thin films. The HfO2-
based thin films have attracted much attention due to their remarkable scalability and CMOS …