Porous anodic aluminum oxide: anodization and templated synthesis of functional nanostructures

W Lee, SJ Park - Chemical reviews, 2014 - ACS Publications
In ambient atmospheres, aluminum becomes rapidly coated with a compact 2–3 nm thick
oxide layer. This native oxide layer prevents the metal surface from further oxidation …

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

V Miikkulainen, M Leskelä, M Ritala… - Journal of Applied …, 2013 - pubs.aip.org
Atomic layer deposition (ALD) is gaining attention as a thin film deposition method, uniquely
suitable for depositing uniform and conformal films on complex three-dimensional …

Co‐recrystallization induced self‐catalytic Li2S cathode fully interfaced with sulfide catalyst toward a high‐performance lithium‐free sulfur battery

Z Li, C Luo, S Zhang, G Sun, J Ma, X Wang, YB He… - InfoMat, 2022 - Wiley Online Library
Lithium sulfide (Li2S) is a promising cathode for a practical lithium‐sulfur battery as it can be
coupled with various safe lithium‐free anodes. However, the high activation potential (> 3.5 …

Atomic layer deposition of nanostructured materials for energy and environmental applications

C Marichy, M Bechelany, N Pinna - Advanced materials, 2012 - Wiley Online Library
Atomic layer deposition (ALD) is a thin film technology that in the past two decades rapidly
developed from a niche technology to an established method. It proved to be a key …

On the Control of the Fixed Charge Densities in Al2O3-Based Silicon Surface Passivation Schemes

DK Simon, PM Jordan, T Mikolajick… - ACS applied materials …, 2015 - ACS Publications
A controlled field-effect passivation by a well-defined density of fixed charges is crucial for
modern solar cell surface passivation schemes. Al2O3 nanolayers grown by atomic layer …

Plasma enhanced atomic layer deposition of SiNx: H and SiO2

SW King - Journal of Vacuum Science & Technology A, 2011 - pubs.aip.org
As the nanoelectronics industry looks to transition to both three dimensional transistor and
interconnect technologies at the< 22 nm node, highly conformal dielectric coatings with …

[HTML][HTML] Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlook

RA Ovanesyan, EA Filatova, SD Elliott… - Journal of Vacuum …, 2019 - pubs.aip.org
The fabrication of next-generation semiconductor devices has created a need for low-
temperature (≤ 400 C) deposition of highly-conformal (> 95%) SiO 2, SiN x, and SiC films …

[HTML][HTML] One-dimensional anodic TiO2 nanotubes coated by atomic layer deposition: Towards advanced applications

F Dvorak, R Zazpe, M Krbal, H Sopha, J Prikryl… - Applied Materials …, 2019 - Elsevier
Atomic layer deposition (ALD) represents a unique deposition technique that allows to coat
uniformly various high aspect ratio (HAR) porous nanostructures, in addition to its traditional …

Low temperature silicon dioxide by thermal atomic layer deposition: Investigation of material properties

D Hiller, R Zierold, J Bachmann, M Alexe… - Journal of Applied …, 2010 - pubs.aip.org
SiO 2 is the most widely used dielectric material but its growth or deposition involves high
thermal budgets or suffers from shadowing effects. The low-temperature method presented …

[PDF][PDF] Multilayered core/shell nanowires displaying two distinct magnetic switching events

YT Chong, D Görlitz, S Martens, MYE Yau, S Allende… - Adv. Mater, 2010 - researchgate.net
The size-dependent properties of pseudo-one-dimensional nano-objects have been
abundantly documented for single-phase rods or wires.[1, 2] Elongated nanostructures that …