The chemical vapor deposition (CVD) of metals is a rapidly develo** area in which metal‐
containing compounds are being synthesized as new precursors. This article reviews this …

Advances in modeling and control will be required to meet future technical challenges in
microelectronics manufacturing. The implementation of closed-loop control on key unit …

High purity, thin metal coatings have a variety of important commercial applications, for
example, in the microelectronics industry, as catalysts, as protective and decorative coatings …

Since the first edition of this comprehensive handbook was published ten years ago, many
changes have taken place in engineering and related technologies. Now, this best-selling …

[57] ABSTRACT A graded gap? ll process in Which, in a high density plasma processing
chamber, an insulating layer is deposited on a substrate Without causing plasma charge …

Micro-and nano-scale devices are used in electronics, micro-electro-mechanical, bio-
analytical and medical components. An essential step for the fabrication of such small scale …

Publisher Summary Past two decades of research and the availability of increased computer
power have significantly increased our understanding of the transport phenomena of …

When I started this book project, I proposed to write a book about my recent advances in
mathematical modelling problems to multicomponent and multiscale systems. I considered …

Today's advances and rapid growth in the fields of nanotechnology provide challenges to
our academic communities to prepare engineering students with an ability to apply …

The functions of materials are correlated with their shapes. Here, we propose a scheme of
functional transformation of a polymeric film by changing the surface shape. After the …