Analog-to-digital converters based on sigma-delta modulators (ΣAM) are a popular choice
for high resolution conversion from the analog to the digital domain. With relatively small …

Electronic readout circuits for microelectromechanical gyroscopes suffer from high power
consumption caused by the electrostatic sensor actuation with signals above the standard …

This paper presents a dual quantization lateral-axis capacitive electromechanical sigma-
delta modulator (EM-ΣAM) vibratory wheel gyroscope under mode-matched condition. A …

Quadrature error in MEMS capacitive gyroscopes can limit the overall sensor performance,
therefore many techniques have been proposed to correct for it. These techniques include …

Microelectromechanical System (MEMS) gyroscopes are inertial sensors used to measure
angular velocity. Due to their small size and low power consumption, MEMS devices are …

In this paper, we presented a novel electrostatic Roll/Pitch MEMS gyroscope with in-plane
drive mode and out-of-plane sense mode. The proposed structure is developed based on a …

A motor drive loop circuit for a micro-electro-mechanical system (MEMS) gyroscope is
provided. The motor drive loop circuit includes a motor configured to drive a proof mass in …

High-performance electro-static gyroscopes require expensive vacuum-packaging, to
maintain the high-Q of the MEMS, and may require high actuation voltages. Piezo sensors …

In this work, a fast and cost-efficient method, to evaluate MEMS gyroscope, in a closed-loop
sense-mode operation (force-feedback), is introduced. The solution proposed in this paper …

In this paper, a novel digital closed-loop interface circuit system of MEMS vibrating
gyroscope is proposed, which includes driving, detection and quadrature circuits. Because …