Advances in manufacturing technology for microstructures are allowing new opportunities
for vacuum electron devices producing radio-frequency (RF) radiation. Specifically, the …

A method is reported for fabricating truly three-dimensional micro-photonic structures directly
onto the end face of an optical fiber using the cross-linkable resist SU-8. This epoxide-based …

This report discusses the optimization strategy, the theoretical background and first
experimental data of a new refractive lens for focusing X-rays. In order to reduce the …

We present the details of our study on the internal stresses and adhesion strengths of SU-8
structures to different substrate seed layers. The effect of adhesion promoter—methacryloxy …

The negative photoresist SU-8 has been recognised as an unique resist, equally useful for
conventional UV lithography as well as deep X-ray lithography (DXRL) applications [2, 7, 12 …

A technique of casting of thick pre-polymer layers was developed based on the proposed
model of diluent evaporation. For the first time, microstructures with 7 mm height and up to …

We have previously demonstrated that it is possible to fabricate densely-packed high aspect
ratio structures in SU-8 by means of a top-plate support member which stiffens the overall …

This report describes the fabrication process by deep X-ray lithography of a new type of hard
X-ray lens made of stacks of identical prisms with dimensions in the 10–20 μm range. The …

Originally conceived for the fabrication of smaller microelectronic features, X-ray lithography
also has attributes of great utility in micromechanical fabrication. In contrast to the many …

We introduce simple double-casting replication methods for high-aspect-ratio
microstructures fabricated by deep x-ray lithography using intermediate molds of soft …