Summary 3D-printed batteries have emerged as a class of unique energy storage devices
with outstanding features of microscale dimensions and aesthetic diversity, which are vital to …

Atomic layer deposition (ALD) relies on alternated, self-limiting reactions between gaseous
reactants and an exposed solid surface to deposit highly conformal coatings with a thickness …

Energy storage and conversion systems, including batteries, supercapacitors, fuel cells,
solar cells, and photoelectrochemical water splitting, have played vital roles in the reduction …

In the past decade, atomic layer deposition (ALD) has become an important thin film
deposition technique for applications in nanoelectronics, catalysis, and other areas due to its …

Processing at the atomic scale is becoming increasingly critical for state-of-the-art electronic
devices for computing and data storage, but also for emerging technologies such as related …

The status and progress toward solid‐state 3D thin‐film Li‐ion microbatteries is reviewed.
Planar thin‐film batteries (TFBs) are commercially available. A major issue with planar TFBs …

The high-quality and conformal thin film is of great importance to performances of functional
materials and devices with high aspect ratio nanostructures. Atomic layer deposition (ALD) …

Abstract Microbatteries (MBs) and microsupercapacitors (MSCs) are primary on‐chip
micropower sources that drive autonomous and stand‐alone microelectronic devices for …

Atomic layer deposition (ALD), which mainly stems from the drive of the semiconductor
industry, is a cyclic, multi-step thin film chemical vapor deposition process based on …

Atomic layer deposition (ALD) represents a unique deposition technique that allows to coat
uniformly various high aspect ratio (HAR) porous nanostructures, in addition to its traditional …