[HTML][HTML] Research trends in methods for controlling macro-micro motion platforms

L Zhang, P Zhang, B Jiang, H Yan - Nanotechnology and Precision …, 2023‏ - pubs.aip.org
With ongoing economic, scientific, and technological developments, the electronic devices
used in daily lives are develo** toward precision and miniaturization, and so the demand …

Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey

WW Huang, X Wang, Y Meng, L Li… - … Journal of Extreme …, 2024‏ - iopscience.iop.org
High-bandwidth nano-positioning stages (NPSs) have boosted the advancement of modern
ultra-precise, ultra-fast measurement and manufacturing technologies owing to their fast …

A novel hollow-type XY piezoelectric positioning platform

L Yuan, L Wang, R Qi, Z Zhao, J **, C Zhao - International Journal of …, 2023‏ - Elsevier
To enhance space efficiency and reduce the planar dimensions of the piezoelectric platform,
propose an innovative three-stage flexible lever hollow XY piezoelectric platform powered …

Development of a novel flexure-based XY platform using single bending hybrid piezoelectric actuator

X Gao, Y Liu, S Zhang, J Deng… - IEEE/ASME Transactions …, 2022‏ - ieeexplore.ieee.org
In this article, a novel flexure-based XY platform using a bending hybrid piezoelectric
actuator was proposed, which was inspired by a classical piezoelectric stack-actuated …

Fuzzy-based adaptive reliable motion control of a piezoelectric nanopositioning system

L Chen, Q Xu - IEEE Transactions on Fuzzy Systems, 2024‏ - ieeexplore.ieee.org
The nonlinearity and cross-axis coupling of piezo-driven multiple-degree-of-freedom
nanopositioning systems impose challenges to achieving precise and reliable motion …

A 2-DOF piezoelectric platform for cross-scale semiconductor inspection

L Yuan, L Wang, R Qi, Y Li, C Liu, G Luo - International Journal of …, 2024‏ - Elsevier
To address the challenge of achieving extensive travel and high precision in semiconductor
inspection, this study proposes a novel 2-DOF cross-scale piezoelectric positioning platform …

Dual-stage fast tool servo cascading a primary normal-stressed electromagnetic stage with a secondary piezo-actuated stage

X Du, D Shen, P Huang, LM Zhu, Z Zhu - Precision Engineering, 2023‏ - Elsevier
The dual-stage actuation effectively extends the dynamic response and tracking accuracy of
conventional fast tool servos (FTS). In this study, a normal-stressed electromagnetic stage is …

Design, assessment, and trajectory control of a novel decoupled robotic nanomanipulator

X Yang, WL Zhu, Z Zhu, LM Zhu - IEEE/ASME Transactions on …, 2022‏ - ieeexplore.ieee.org
To avoid the problems of low bandwidth or complex structure brought by conventional serial
and parallel mechanisms, a novel decoupled robotic nanomanipulator (DRNM) with a hybrid …

Influence of multidirectional oscillations on output characteristics of inertial piezoelectric platform

J Deng, Y Liu, J Li, S Zhang… - IEEE/ASME Transactions …, 2022‏ - ieeexplore.ieee.org
A piezoelectric platform driven by a multifunctional piezoelectric actuator is used to
investigate the influence of multidirectional oscillations on the output characteristics of an …

Youla parameterization-based fractional repetitive control of arbitrary frequency disturbance rejections for line-of-sight stabilization

N Feng, Y Ruan, T Tang - IEEE Transactions on Industrial …, 2023‏ - ieeexplore.ieee.org
This article proposes a fractional repetitive control (FRC) based on Youla parameterization
to reject arbitrary disturbances up to the Nyquist frequency. This control strategy transforms …