Angle measurement is an essential component of precision measurement and serves as a
crucial prerequisite for high-end manufacturing. It guides the implementation of precision …

Optical metrology is one of the key technologies in today's manufacturing industry. In this
article, we provide an insight into optical measurement technologies for precision …

Laser interference lithography is an attractive method for the fabrication of a large-area two-
dimensional planar scale grating, which can be employed as a scale for multi-axis optical …

In dimensional metrology it is necessary to carry out multi-axis angle and displacement
measurement for high-precision positioning. Although the state-of-the-art linear …

A mode-locked laser autocollimator, in which a group of first-order diffracted beams from a
grating reflector are detected by an autocollimation unit, has an expanded angle …

A mode-locked femtosecond laser, which is often referred to as the optical frequency comb,
has increasing applications in various industrial fields, including production engineering, in …

This article proposed an angle measurement method based on second harmonic generation
(SHG) using an artificial neural network (ANN). The method comprises three sequential …

This paper provides an overview of state-of-the-art sensing and machine learning
technologies for intelligent measurement in smart and precision manufacturing. Length …

Laser autocollimation is innovated for absolute angular position measurement based on an
optical frequency comb. The conventional laser autocollimation can only make relative …

An influence model of collimating lens aberrations in an autocollimation system based on
the ray-tracing method is established. With the ray-tracing method, this model can accurately …