At the nanoscale, accurate control and position sensing are recurrent issues conditioning
advances of technologies and instruments in diverse fields of application. Recent advances …

This study presents a micro-vision-based measurement method for realtime and high
accuracy in-plane displacements tracking of the precision positioning stage. In this method …

ABSTRACT A new motor architecture that uses in-plane electrostatic gap-closing actuators
along with a flexible driving arm mechanism to improve motor force density is introduced …

Computer vision is a convenient noncontact tool for position control and thus constitutes an
attractive multidirectional alternative to widely used single-direction sensors. However, to …

The retrieval of an observed object's pose is an essential computer vision problem. The
challenge arises in many different fields, among them robotics control, contactless …

A vision-based method for planar position measurement - IOPscience Skip to content IOP
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The development of automation at the nanoscale has been calling for precision motion
sensing for robotic nanopositioners. This study presents a microvision-based measurement …

This study demonstrates a monolithic 1 x 4 optical switch composed of a planar micro-
electro-mechanical system (MEMS) integrated with silicon nitride (SiN) waveguides. The …

There have been relatively few studies on mechanical properties of nanomaterials under
high strain rates, mainly due to the lack of capable nanomechanical testing devices. Here …

In this paper, we present a new method for detecting in-plane displacements in
microelectromechanical systems (MEMS) with an unprecedented sub-ångström accuracy …