Mesoscopic physics of nanomechanical systems
Nanomechanics has brought mesoscopic physics into the world of vibrations. Because
nanomechanical systems are small, fluctuations are significant, the vibrations already …
nanomechanical systems are small, fluctuations are significant, the vibrations already …
Elastic PMLs for resonator anchor loss simulation
Electromechanical resonators and filters, such as quartz, ceramic, and surface‐acoustic
wave devices, are important signal‐processing elements in communication systems. Over …
wave devices, are important signal‐processing elements in communication systems. Over …
High-fidelity modeling of MEMS resonators. Part I. Anchor loss mechanisms through substrate
A computational model is developed for the prediction of wave propagation in the substrate
of a MEMS resonator to study energy loss mechanisms from the vibrating beams to the …
of a MEMS resonator to study energy loss mechanisms from the vibrating beams to the …
Design of lossless anchors for microacoustic-wave resonators utilizing phononic crystal strips
FC Hsu, JC Hsu, TC Huang, CH Wang… - Applied Physics …, 2011 - pubs.aip.org
In micromechanical acoustic-wave resonators, energy dissipation through the anchors into
the substrates may result in a low quality (Q) factor. To eliminate the ill effect of anchor …
the substrates may result in a low quality (Q) factor. To eliminate the ill effect of anchor …
Multi-objective design optimization of electrostatically actuated microbeam resonators with and without parameter uncertainty
Electrostatically actuated microbeam resonators are widely used components in
microelectromechanical systems for sensing and signal filtering purposes. Due to the …
microelectromechanical systems for sensing and signal filtering purposes. Due to the …
A substrate energy dissipation mechanism in in-phase and anti-phase micromachined z-axis vibratory gyroscopes
This paper analyzes energy dissipation mechanisms in vacuum-operated in-phase and anti-
phase actuated micromachined z-axis vibratory gyroscopes. The type of actuation is …
phase actuated micromachined z-axis vibratory gyroscopes. The type of actuation is …
Review and comparison of different support loss models for micro-electro-mechanical systems resonators undergoing in-plane vibration
Several approaches for calculating support loss in micro-electro-mechanical system
resonators undergoing in-plane vibration are reviewed. In each of them, the support is …
resonators undergoing in-plane vibration are reviewed. In each of them, the support is …
Anchor loss reduction in micro-electro mechanical systems flexural beam resonators using trench hole array reflectors
The quality factor of microelectromechanical resonators is a crucial performance metric and
has thus been the subject of numerous studies aimed at maximizing its value by minimizing …
has thus been the subject of numerous studies aimed at maximizing its value by minimizing …
Modeling the effect of anchor geometry on the quality factor of bulk mode resonators
High quality factor (Q) resonators are desired for numerous applications such as clocks and
gyroscopes. For bulk acoustic wave resonators, energy dissipation through the anchors (ie …
gyroscopes. For bulk acoustic wave resonators, energy dissipation through the anchors (ie …
A semi-analytical tool based on geometric nonlinearities for microresonator design
S Preidikman, B Balachandran - Journal of Micromechanics and …, 2006 - iopscience.iop.org
In this paper, a computational mechanics model specifically tailored for composite
microresonators with piezoelectric actuation and piezoelectric sensing is developed and …
microresonators with piezoelectric actuation and piezoelectric sensing is developed and …