Driving a micro and nanomechanical structure to resonance and observing its resonant
motion in the physical world have led to numerous fundamental discoveries in physics …

This paper fabricated a high-performance nanodiamond (ND)/cellulose nanocrystal (CNC)
composite-based acoustic humidity sensor. First, the effects of changes in both mass and …

This work presents the single-chip integration of a multi-frequency surface acoustic wave
resonator (SAWR) based humidity sensor. Graphene oxide (GO), a humidity-sensing …

With the emerging “Internet of Things” technology, humidity sensors are becoming
indispensable in agriculture, industry, medicine, and environmental monitoring. However …

An atmospheric‐pressure spatial atomic layer deposition system is used to rapidly deposit
60 nm zinc–aluminum oxide (Zn–AlOx) thin‐film‐encapsulation layers directly on perovskite …

We report on the deployment of MEMS static bifurcation (DC) sensors for the detection of
volatile organic compounds (VOCs): hydrogen sulfide and formaldehyde. We demonstrate a …

MEMS resonators exhibit rich dynamic behaviors under the internal resonance regime. In
this work, we present a novel MEMS bifurcation sensor that exploits frequency unlocking …

The exceptional point (EP), a non-Hermitian degeneracy at which eigenvalues and
eigenvectors coalesce simultaneously, is investigated in mechanical oscillators involving a …

MEMS/NEMS resonant sensors hold promise for minute mass and force sensing. However,
one major challenge is that conventional externally driven sensors inevitably encounter …

This paper investigates the fundamental sensing mechanism of electrostatic MEMS gas
sensors. It compares among the responsivities of a set of MEMS isopropanol sensors before …