Effect of Al precursor's properties on interactions with self-assembled monolayers for area selective deposition

E Gu, J Yan, B Li, H Zhou, Z Lu, Y Wen… - Journal of Vacuum …, 2024 - pubs.aip.org
Area selective deposition (ASD) is a high-precision atomic-level manufacturing technology
that enables the development of bottom-up manufacturing methods in the future …

Computational ab initio approaches for area-selective atomic layer deposition: methods, status and perspectives

F Pieck, R Tonner-Zech - 2024 - chemrxiv.org
Area-selective atomic layer deposition (AS-ALD) has emerged as a transformative technique
in nanotechnology, enabling the precise deposition of materials on designated substrates …