The miniaturization of microelectromechanical systems (MEMS) physical sensors is driven
by global connectivity needs and is closely linked to emerging digital technologies and the …

Directed self-assembly of block copolymers is a bottom-up approach to nanofabrication that
has attracted high interest in recent years due to its inherent simplicity, high throughput, low …

Open nanofluidic systems, where liquids flow along the outer surface of nanoscale
structures, provide otherwise unfeasible capabilities for extremely miniaturized liquid …

We demonstrate the implications of very low voltage operation (< 1 kV) of a scanning
electron microscope for imaging low-dimensional nanostructures where standard voltages …

Highly sensitive conversion of motion into readable electrical signals is a crucial and
challenging issue for nanomechanical resonators. Efficient transduction is particularly …

We describe an optical transduction mechanism to measure the flexural mode vibrations of
vertically aligned nanowires on a flat substrate with high sensitivity, linearity, and ease of …

A stepped cantilever composed of a bottom-up silicon nanowire coupled to a top-down
silicon microcantilever electrostatically actuated and with capacitive or optical readout is …

We present the fabrication of silicon nanowire (SiNW) mechanical resonators by a resistless
process based on focused ion beam local gallium implantation, selective silicon etching and …

The formation of self-assembled contacts between vapor–liquid–solid grown silicon
nanowires and flat silicon surfaces was imaged in situ using electron microscopy. By …

We present the fabrication, operation, and CMOS integration of arrays of suspended silicon
nanowires (SiNWs). The functional structures are obtained by a top–down fabrication …