Glass based micro total analysis systems: Materials, fabrication methods, and applications

T Tang, Y Yuan, Y Yalikun, Y Hosokawa, M Li… - Sensors and Actuators B …, 2021 - Elsevier
Microfluidics has become recognized as a powerful platform technology with a wide range of
applications in various fields, such as biology, biomedicine, chemistry and environment. To …

Recent advances in mems-based 3d hemispherical resonator gyroscope (hrg)—a sensor of choice

AR Ranji, V Damodaran, K Li, Z Chen, S Alirezaee… - Micromachines, 2022 - mdpi.com
Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision
motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical …

Fused silica microchannel fabrication with smooth surface and high etching selectivity

K Morikawa, P Chen, HL Tran, Y Kazoe… - Journal of …, 2023 - iopscience.iop.org
Channel fabrication technology has become increasingly important for microfluidic and
nanofluidic devices. In particular, glass channels have high chemical and physical stability …

Carbide-bonded graphene-based Joule heating for embossing fine microstructures on optical glass

L Li, G Yang, WB Lee, MC Ng, KL Chan - Applied Surface Science, 2020 - Elsevier
This paper reports the fabrication of high-quality microstructures on optical glass via hot
embossing using carbide-bonded graphene (CBG) based Joule heating for the first time. In …

High aspect ratio channel fabrication with near-infrared laser-induced backside wet etching

KK Kwon, H Kim, T Kim, CN Chu - Journal of Materials Processing …, 2020 - Elsevier
Laser-induced backside wet etching (LIBWE) is one of the most promising manufacturing
processes for fabricating high aspect ratio microfeatures of glass. However, cracks inside the …

CYK4 relaxes the bias in the off-axis motion by MKLP1 kinesin-6

Y Maruyama, M Sugawa, S Yamaguchi… - Communications …, 2021 - nature.com
Centralspindlin, a complex of the MKLP1 kinesin-6 and CYK4 GAP subunits, plays key roles
in metazoan cytokinesis. CYK4-binding to the long neck region of MKLP1 restricts the …

Study on warpage and filling behavior of glass in non-isothermal hot embossing

J Li, F Gong, G Yang - Ceramics International, 2023 - Elsevier
Non-isothermal hot embossing has great potential in the mass production of glass micro
optical components due to the relatively short heating-cooling cycle time. However, warpage …

Laser-drilling formation of through-glass-via (TGV) on polymer-laminated glass

Y Sato, N Imajyo, K Ishikawa, R Tummala… - Journal of Materials …, 2019 - Springer
Abstract A three-dimensional (3D) glass integrated passive device (IPD) is an evolutionally
advanced configuration to dramatically reduce the electronics form factor and manufacturing …

Torque generating properties of Tetrahymena ciliary three-headed outer-arm dynein

S Yamaguchi, M Yamagishi, J Yajima - Scientific Reports, 2022 - nature.com
Eukaryotic cilia/flagella are cellular bio-machines that drive the movement of
microorganisms. Molecular motor axonemal dyneins in the axoneme, which consist of an 9+ …

[HTML][HTML] Complete procedure for fabrication of a fused silica ultrarapid microfluidic mixer used in biophysical measurements

D Izadi, T Nguyen, LJ Lapidus - Micromachines, 2017 - mdpi.com
In this paper we present a method to fabricate a fused silica microfluidic device by
employing low viscosity KMPR photoresists. The resulting device is a continuous-flow …