In this article, we review optical MEMS accelerometers with a particular focus on sensing
techniques and interrogation methods. Optical accelerometers find use in various …

Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of
accelerometer which combines the merits of optical measurement and Micro-Electro …

In view of the large scientific and technical interest in the MEMS accelerometer sensor and
the limitations of capacitive, resistive piezo, and piezoelectric methods, we focus on the …

Optical accelerometers are high-precision inertial sensors that use optical measurement
technology to achieve high-precision and electromagnetic interference-resistant …

In this paper, a novel graphene-based optical micro-electro-mechanical systems (MEMS)
accelerometer sensor is proposed, which is relied on unique properties of graphene and …

Non-Hermitian photonics has attracted increasing attention especially for sensing
applications. Two coupled optical systems, designed to work at the “exceptional point” …

In this paper, a novel highly sensitive differential optical MEMS accelerometer based on
intensity modulation is proposed by using dual optical outputs and a two-dimensional (2D) …

In this article, a novel optical micro-electromechanical system (MEMS) acceleration sensor
based on a metal Fabry–Pérot (FP) microcavity is investigated using the transfer matrix …

In our work, an optical MEMS accelerometer based on wavelength modulation is proposed,
using a double nanoscale distributed Bragg reflector (nano-DBR) structure. In view of its …

Proposed work consist of simple and micro size optical MEMS based displacement sensor
for detection of muscle movement in human body. Optical MEMS based structure, analyzed …